High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

Table of Contents

Mep a = 1000 2000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 L2 (mm) L3 (mm) Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (

Floating Joint

J J Centering is unnecessary. A high level of machining accuracy is unnecessary. Spherical rotation The installation time is dramatically reduced. It is compact and is suitable for high tensile stresses.

MQQ

A B FD FT FV FX FV MI W S 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ CEP1 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50, 75, 100 64 42 5.5 8 48 56 CE1 28 10 to 50, 75, 100 70.5 48.5 5.5 8 54 62 25, 28 CE2 Bore size (mm) FZ L M FV 10 55 18 ML2B 16 60 20 FX FT L B + Stroke 20 64 20 C J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72

MQQ

J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72 22 40 CV MVGQ CC Head side flange style: MQQTG 10, 16, 20 25, 28 RB 2-FD 4-FD J Bore size (mm) Stroke range (mm) A L DM FV FV 10 10 to 40 45 8 B + Stroke -X L FT FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 2025 10 to 50, 75, 100 62 12 28 10 to 50, 75, 100 68.5 12 Data (Dimensions except A and L are same as rod side flange style

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PW GB PH 2 x Cushion valve Width across flats B1 MM LZ D E C B F H1 C M N BN AL B K A S + Stroke M H ZZ + Stroke With rod boot l 10.2 h + l ZZ + l + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR H1 J Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32

CLA

A 09 9N 9P BO (mm) Without boot With boot ,, ZZ+t+SlroItQ MM J 00 oE F GA GB GC GO GL GR J K L L2 16 32 10 85 15 26 54 10 10 M8xl.2S 6 30 71 40 500 20500 27 30 60 96 y. Y. 44 M14X l .5 M18X l .5 M\8X l .5 M22Xl.5 M26X1.5 , 50 -600 20-600 32 35 70 108 Y. Y. 52 63 !

51

MB1 D-G5, K5, G5W, G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8/D-C73C, C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-H7, H7W D-H7NF, H7BA, D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 Hs Hs 24.5 16 A B B A (mm) Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NT D-G5BA Auto switch model Auto switch model D-M9 D-M9W D-M9A D-A9 D-H7

1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

MK

Do not clamp on a slanted surface. 5. Make sure that the workpiece does not move during clamping. J D-X 20Data Fig. (5) Fig. (6) 10-7-3 4 Rotary Clamp Cylinder: Standard Type Series MK 12, 16, 20, 25, 32, 40, 50, 63 How to Order MK A S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M20 x 1.5 20 B J M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M24 x 1.5 31.5 C series rod K M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M30 x 1.5 31.5 A M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M39 x 1.5 40 Note) The pin, keeper plate and cap bolt are included with a double knuckle joint.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

C85

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com h (mm) (mm) f g c j a Bore Model Thread d3 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 dh7 h 27 27 30 30 36 43 d6 18 18 20 20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

CNA

(mm) Stroke range (mm) A AL B B1 BF BN BP BQ C D E FD FT FV FX FY FZ GA GB GC GD GL GL1 GR H1 J 40 50 63 80 100 30 27 60 22 71 96 1/8 1/8 44 16 32 9 12 60 80 42 100 85 15 52 16 12 12 10 8 M8 x 1.25 Up to 800 Data 35 32 70 27 81 108 1/4 1/8 52 20 40 9 12 70 90 50 110 95 17 56.5 20 13 15 12 11 M8 x 1.25 Up to 1000 35 32 86 27 101 115 1/4 1/4 64 20 40 11.5 15 86 105 59 130 102 17 67 20 18 12

CNA

40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 J KA L MM N P Q H S T U V W Z ZZ K RR 6 M8 x 1.25

CL

CLQ Lock operation Type Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic locking E P D MLGP N A Non-lube/Rubber bumper Non-lube/Air cushion RLQ Bore size Cylinder stroke (mm) 20 25 32 40 20 mm 25 mm 32 mm 40 mm With rod boot MLU Bore size (mm) Standard stroke (mm) Long stroke (mm) Without rod boot Nylon tarpaulin Heat resistant tarpaulin 20 Nil J

ISO Standard Hydraulic Cylinder

MM B CD D E V MA Air release Cushion valve NB NA K F A B C W W CX RR L S + Stroke ZZ + Stroke H CB Stroke range Bore size (mm) B CD F A D CB G C E GA J NB S CX GB L NA P PJ RR MM MA K H 40 52 14 64 8 25 to 800 M6 x 1 M16 x 1.5 46 29 12 22 22 19 40 34 33 107 20 16 19 3/8 58 17 19 47 50 25 to 800 65 64 M8 x 1 M20 x 1.5 46.5 28.5 14 15 28 28 24 50 42 34 108 20 16 19 3/8 58 17 25 11 59 +0.043