Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

A

M5) NAN110-N01 (1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (

CXS

side: Same) 102 156 62 20 CXSW10-20 112 176 72 30 CXSW10-30 (Z) (20) 4-M3 x 0.5 with depth 5 4 (20) 122 196 82 40 CXSW10-40 2-M4 x 0.7 with depth 7 132 216 92 50 CXSW10-50 157 266 117 75 CXSW10-75 182 316 142 100 CXSW10-100 207 366 167 125 CXSW10-125 0.2 232 416 192 150 CXSW10-150 For CXSW10-10 and CXSW10-20 only, a part of the switch rail (dimensions marked with an "") is notched to facilitate

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 19 Not included for Option Z (Removed parts) 20 Not included for Options Z and Z1 (Removed parts) 15 Thermo-chiller/Rack Mount Type HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR012-W-20 HRR018-W-20 HRR024-W-20 HRR030-W-20 Cooling method Water-cooled refrigeration Refrigerant R410A

Magnetically Coupled Rodless Cylinder

In this case, an intermediate stop can be performed only by using an external stopper, etc. Note 2) Depending on the operating environment, etc., order made products should also be reviewed. Note 3) An external guide system should be installed when over specifications. (Refer to page 6 for intermediate stops.) (Refer to pages 20 through 24.)

Rotary Table/

ro en Size ta t r ti n r o n an e n d tio ge 95 ta 10.2 10 20 30 50 70 100 200 ro m mu 7.2 xi Ma 6.5 8.2 7.0 Note) The drawing shows the rotation range of the positioning pin hole.

MY1

20 10 10 1.

MB

N W V 32 40 50 63 80 100 27 27 31.5 31.5 38 38 38 M27 x 2.0 13 M12 x 1.75 6 20 22 30 35 35 40 40 27 125 to 1000 50 223 97 15 4 4 5 9 11.5 17 17 120 1/2 13 14 15.5 16.5 19 19 19 27 60 32 32.5 38 46.5 56.5 72 89 110 136 54 46 52 65 75 95 114 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 16 16 16 16 16 16 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10

MXF

20 MXF8-10 0.01 0.02 0.01 MXF8-10 0 0 0 10 20 30 40 10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

RSH/RS1H

30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

energy saving effect

W: 13 [kW] W Efficiency Power supply output VI: 20 [kVA] Q = P = Q = P = V x I x Power factor In this example, using an efficiency of 0.7: In this example, using a power factor of 0.85: 13 0.7 = = 18.6 [kW] = 20 [kVA] x 0.85 = 17 [kW] Cooling capacity = Considering a safety factor of 20%, Cooling capacity = Considering a safety factor of 20%, 18.6 [kW] x 1.2 = 22.3 [kW] 17 [kW] x 1.2 = 20.4

MVGQ

ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CE2

Besides, the whole accuracy after mounting on an equipment may be varied depending on the mounting condition and surroundings. As an equipment, calibration should be done by customer. 110C K Neoprene cross ML2B Maximum ambient temperature for the rod boot itself. C J G5-S Auto Switch Mounting Bracket Part No.

10

K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51 26 56 76 100 24 80 MHL2-10D1Z 54 52 67 42 78 118 142 39 108 MHL2-10D2Z 72 70 85 60 96 156 180 57 146 J dimension is at fully closed.

HRS100/150

415 VAC (50/60 Hz) 20 A M5 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 HRS150-Al-40-l HRS150-Wl-40-l Note) An example of the cable specifications is when two kinds of vinyl insulated wires with a continuous allowable operating temperature of 70C at 600 V, are used at an ambient temperature of 30C.

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 4.