MLGP

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20

MLGP

9 qo r !3 @1 e #1 #4 @0 !8 t @3 B' CL !7 N@4 CL1 A' A A' A MLGC CNG B MNB @5 !5 CNA CNS 20, 25: 50 stroke or less Over 100 stroke CLS CLQ Extension locking (Type F) Retraction locking (Type B) MLGP N#2 u #6 y @2 u #6 #2 y #5 @2 i i RLQ MLU ML1C D-X Section B-B' Section B-B' 20Section A-A' !6 !6 Section A-A' Data Component Parts Description Material Note No. !7 !8 !

Title not found

no.) 20 m A1 B1 (13.5) Produced upon receipt of order A6 B6 1 2 Connector D (14.7) 15 16 Connector A (30.7) L (11) (10) Connector A terminal no.

CE

V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

ZR

Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

CE

V Red F 0 V Black G Shield 10-12-20 20 Stroke Reading Cylinder Series CE1 Construction 12, 20 32 @7 @4@8 @0 oi @3 !

CNS

PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 24 V 2-wire 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) IC circuit 24 V 5 V, 12 V 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 2-wire 3-wire (NPN) IC circuit Terminal conduit Relay, PLC 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color

Compact

LEM LEM A-A 3 3 A LEY 4 x 5.5 LES Counterbore diameter 9.5, depth 5.4 Stroke adjuster LEPY LEPS Workpiece mounting center line 69 10.2 66 10 LER B 44 LEH T-slot for mounting Slot for auto switch A Stroke + 160 Stroke + 140 10 17 17 Stroke adjuster LEY -X5 60 11LEFS 11LEJS 102.3 (102) 0.3 (93) 20 20 65 20 28 25A27.3 (28) 27 20 LEC Motor cable length 300 139 LEC S 7.5 Note 1) [ ] for when

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Seal kit includes a grease pack (10 g). When !5 or !6 is shipped independently, a grease pack (20 g) is included. Order with the following part number when only the grease pack is needed. Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) D-X Technical Data 1213 A MY1H Series Construction End lock !9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

MY1

(Except 50) MY2 H/HT MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 Side port Side port Front port Front port MY3A MY3B L L L L L L R R R R R R MY3M R L R L R R L L Bottom port Bottom port L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 This port cannot be used.

Plug-in Unit

A SOL. A (+) () () (+) 17 17 Station 9 Station 9 SOL. B SOL. B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec.

Shock Absorbers and Rate Controls

Pdrt Numlel llodel (Rel) A I D T H I K UFfll0xl ut 6363109 0 tli0. l l'l( E ) M l O x l r,50 .41 .24 .25 1.000.98 0.49 IVA.20 N/A Ut l2rl ut5588189 0H,r. r 5 (BI M l 2 x l t.50 .47 .24 .15 1.000.980.49 N/A.20 N/A UlV2.20 ut3935095 ([n)0EM.25(B) rr.?0 uNt 1.50 .56.28 -t) t.001.00 0.50 fl/A .?0 il/a UtjA6.

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

SQ1000/2000

SUP/EXH block Note 1) SSQ2000-PR-3-C10-(S) Back pressure check valve Note 2) SSQ2000-BP SUP block plate SSQ1000-B-R EXH block plate SSQ2000-B-R Port plug Note 3) P R A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) Note 4) 4 (5/32") One-touch fitting C6 (N7) 6 (1/4") One-touch fitting C8 (N9) 8 (5/16") One-touch fitting Single wiring

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Title not found

l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?

15

Contents 6 CYS06-37 -AJ024-R CYS06-37AAJ024-R 10 CYS10-37 -AJ025-R CYS10-37AAJ025-R 15 Set of the nos. 25, 26, 33 Set of the nos. 34, 41 Set of the nos. 37 BMY3-016 20 CYS20-37 -AJ027-R CYS20-37AAJ027-R 25 DCYS25-37 -AJ028-R 32 CYS32-37 -AJ029-R CYS32-37AAJ029-R 40 -X Note 3) A switch spacer, as specified in the table above will be required if an auto switch is mounted afterward.

ZP

5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A

Modular Type Lubricators Series AL

Check the dripping amount once a day. Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.