Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: w/o Lead Wire w/M8 Connector, Unit Specification: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: -, Calibration Certificate: -, Made to Order: -
An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?
An angled supply port facilitates the supply of circulating fluid, even when units are?stacked.? A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?
1 AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.
Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.
10 m, 15 m, 20 m Extension Cable (Option) Note 1) This includes the digital display error of the counter (CEU5).
) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16
Extension stroke end adjuster Retraction stroke end adjuster MXQ8A-m-X2192 31.5 41.5 17 25 5 11 13 8 3 13 16.6 18.2 M6 x 0.75 2.5 MXQA-AS8-X2202 MXQA-AT8 MXQ12A-m-X2192 36.5 46.5 18 27 6.5 11 16 10 4 16.2 18.9 20.7 M8 x 1 2.5 MXQA-AS12-X2202 MXQA-AT12 MXQ16A-m-X2192 41.5 51.5 20 28 8 11 17 12 5 20 25.2 26.9 M10 x 1 3 MXQA-AS16-X2202 MXQA-AT16 MXQ20A-m-X2192 48.5 58.5 22 31 10 12 20 17 6 27
stations 2 to 20 stations 20 C44 C46 Note 1) An asterisk () indicates order made products.
Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
SB) 4 7 7 5 5 5 3 7.5 5 MRHQ 3 5 3 90 90 5 90 5 AI Misc. 20 20 20 20 D(3-SA) 20 20 20Section SD SD MHSJ3-63D MHSJ3-80D 4 10 4 11 3 5 3 5 90 90 5 20 20 20 20 (mm) AI 54 57 70 79 93 L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 M 2 2 2 3 4 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 NB
m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load
Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.
Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 25 40 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10
Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.
3.2 14.5 VP4 36 (45) S0700 (4.9) (37) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) VQ VQ4 (40.2) 12.7 40.4 (36.7) 28.1 [35.1] 20.5 + VQ5 VQC 15 0.8 (20) 1.6 VQZ For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 SQ VFS VFR M plug connector (M): DIN terminal (D, Y): M8 connector (WO): L plug connector (L): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5
: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 Standard Motor/Horizontal