High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Fitting type LVQ E T Union elbow Union tee Class t Applicable tubing size LQ Class Applicable tubing size (mm) 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" Applicable tubing size (mm) 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 No. 2 2 3 3 3 4 4 5 5 No. 2 2 2 3 3 4 4 5 5 1 2 1 2 3 1 2 1 2 A B C A B A B A

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. 2700 for LEFB 15 - LECSC-T LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

The rotation range under the adjustment of an angle at 60 is indicated below. e g n R o t a a ti o r n r n a R n o o g ti t e a a ti o t n o r R a n Note) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clockwise direcNote) If it is pressurized by the port indicated with the arrow, the shaft rotates in the clock-wise direction.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

a L1 (mm) L2 (mm) L3 (mm) 200 a = 2000 Pitching Rolling Yawing Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page

MLGP

bolt 0.02 X 0.02 IG X DA IB RLQ VA VB R H T ID U X PW IG MLU DB ML1C 2-Rc 3/8 (Plug) IF Unlocking port 6 depth 10 H7 D2-Rc 3/8 PB GA GC Unlocked when pressurized 10 GB Q PA + Stroke G IE J JA JB K -X 6 depth 10 H7 S FA FB C + Stroke B + Stroke A + Stroke E 20Note 1) The intermediate strokes other than the standard strokes at left are manufactured by means of installing a spacer.

MLGP

199 36 46 41 136 153 156 15 21 16 174 196 199 32 42 37 132 149 152 52 62 57 152 169 172 9-11-26 26 Compact Guide Cylinder with Lock Series MLGP Dimensions: 80, 100 MLGPM/MLGPL 6 depth 10 H7 WA Z WB b a H7 6 c d 7 e T-slot dimensions CL 5 10 6 H7 X X 0.02 CL1 c d e Detailed figure of XX section b 20.3 23.3 Bore size (mm) a 13.3 15.3 80 100 12 13.5 8 10 22.5 30 MLGC 4-YY depth YL Bottom view

Plug-in Unit

) A B A B A B A B A A A B 143 9 9 10 143 (32) (98.8) 10 163 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas: L1 = 25n + 106, L2 = 25n + 241 (For 1 input block.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Enclosure: IP65 Leakage Select from 2 Piping Directions. 1 x 10-10 Pam3/s Rear ported Bottom ported 1 x 10-5 Pam3/s Applicable Fluid Examples Welded structure for sensor units and fitting parts Select from a face seal or compression fitting.

TABLE OF CONTENTS

A Three Way Valve or a Two Way Normally Open Valve is operating at a high cycle rate (greater than 200 C.P.M.) 4. A Three Way Valve or a Two Way Normally Open Valve is operating at a long duty cycle (such as On Time=1 hour, Off Time = 10 minutes) 5.

MQQ

J G5-S FZ 25 65 22 34 A + Stroke 4-FD 28 72 22 40 CV MVGQ CC Head side flange style: MQQTG 10, 16, 20 25, 28 RB 2-FD 4-FD J Bore size (mm) Stroke range (mm) A L DM FV FV 10 10 to 40 45 8 B + Stroke -X L FT FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 2025 10 to 50, 75, 100 62 12 28 10 to 50, 75, 100 68.5 12 Data (Dimensions except A and L are same as rod side flange style

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 EA 8.5 13 EC 9 13.5 EY 36 56.5 FA 56.4 67.8 h 6 6 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) W 25.8 38 E 17.5 25 Shock absorber model RB1412 RB2015 8-13-19 20 Series MY2 Side Support Side support MYC-SA G 2-H C B A F E D Courtesy of Steven

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS-T A (1) (2) L4 (1) (2) Weight (g) Model M1 D1 D2 L1 L2 L3 d T H Min.

HRX-OM-W038

Allowable voltage range 10% Electric system Breaker14 A 20 Applicable earth leakage breaker capacity A 20 Maximum operating current A 14 ( For option -T:17) Rated operating current3 (50/60Hz) A 7.9/9.6 6.9/8.4 Rated power consumption3 (50/60Hz) kVA 1.6/1.9 1.5/1.7 Noise level9 (50/60Hz) dB 64 / 66 Dimensions10 mm W377xD592xH676 (W14.8XD23.3xH26.6[Inch]) Accessory Fitting (for drain port)

MY2

H unit Use this unit when the cylinder is operated in a load and speed range above the L unit limit line and below the H unit limit line. 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

Electric Actuator Triple Axis P&P Unit

Minimum number of T nuts required for each stroke Stroke (mm) 100400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 Number of T nuts (pcs.) 8 10 12 14 16 18 20 Model LJ1-T8 (Weight: 8.4g) M8 x 1.25 17.5 7.5 15 The end cover must be removed when a T nut is inserted into the T slot. 18 11.5 M6 x 20 4 positions 45 10 T slots for mounting 9.4 4.5 T-slot size End cover A A A A 110 The A dimension

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C. PA PB PA N.O. B A B A PB B A N.C. N.O. Double acting Double acting With flow rate adjustment N.C. PA PA B A B A PB Double acting N.C.

10

B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5