KR

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

CRB2/CRBU2/CRB1

B C D R Model 31 45.5 14 M5 x 0.8 CDRBU2WU10-D 25 47 18 M5 x 0.8 CDRBU2WU15-D 34.5 51 20 M5 x 0.8 CDRBU2WU20-D 47.5 55.5 22 M5 x 0.8 CDRBU2WU30-D 52 Rotary Actuator with Angle Adjuster Free-Mounting Type Series CDRBU2WU Dimensions: 40 (with Angle Adjuster and Auto Switch Unit) Single vane/Double vane type CDRBU2WU40-S, D h Keyway dimensions L b h (h9) L b (h9) Model 52 64 0 0.030 4 20 0 0.030

TABLE OF CONTENTS

V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

Aluminum High Vacuum Angle Valve

With indicator K (DN) E H V I G L H A V V M A C U U Without indicator Flange side r Temperature specifications/Heater t Auto switch type Heater With 100C heater With 120C heater Temperature 5 to 60C Symbol Nil Auto switch model Remarks Without auto switch (without built-in magnet) Symbol Nil High temperature type D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N

IIIIIII

0.17 in. 4.4 mn o.T. 0.0E an. l.0mm) T T O.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A E c D E F G H K M N P H 5.O7 (128 9) 4.39 (1 1 1.4) 1 1 8 (30) 1 6 9 t 7 5 '| _5 | 1 " (3) 080 20.4 1 5 7 a{I)l o71 alA) 0 9 6 24 S\ '1.26 (321 1 4 2 t36l 1 2 0 'io 5 ,2/ (6) Millimelsrs in Pargntheses Series NVM MECHANICALLY ACTUATED/PILOT OPERATED DIMENSIONS NVZM45O N\ZM45o-N014 A ts D E F I H J K M N P H

VZ100/300/500

connector (L) VZ32-L-M5 M plug connector (M) VZ32-M-M5 DIN terminal (D) VZ32-D-M5 (Lead wire length) Applicable cable O.D.: 3.5 to 7 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-16 17 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 Base Mounted (With sub-plate) Grommet (G), (H) VZ34-01 G H V100 SY SYJ VK Manual override (Non-locking) (Mounting

CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

Mechanical Valves Series NVM, NVFM, NVZNI

0.17 in. 4.4 mn o.T. 0.0E an. l.0mm) T T O.25 in. (6.4 mm) '75 PSIG (5 Kgflcm2) A E c D E F G H K M N P H 5.O7 (128 9) 4.39 (1 1 1.4) 1 1 8 (30) 1 6 9 t 7 5 '| _5 | 1 " (3) 080 20.4 1 5 7 a{I)l o71 alA) 0 9 6 24 S\ '1.26 (321 1 4 2 t36l 1 2 0 'io 5 ,2/ (6) Millimelsrs in Pargntheses Series NVM MECHANICALLY ACTUATED/PILOT OPERATED DIMENSIONS NVZM45O N\ZM45o-N014 A ts D E F I H J K M N P

CHKD/CHKG

D H Part no.

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

SMC

D-Y69A/Y7PV/Y69B D-Y7W D-Y7WV D-Y7BAL D-P5WL D-F9G/H D-Y7G/H D-G5NBL D-F8 Solid state switch Reed switch Please refer to the next page for applicable auto switches and cylinders in the fields marked with asterisks (). 182 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LEC-OM07605CN

A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * * (8) 8 8 8 CPU CPU (1) # # b . (3) # # d . # # C . 1. ## ## 01 1 64 64 2. *** 3.

AC

Ex.) 2R Without valve function D 3 8 1 2 3 4 Float style auto drain (N.O.) AFM3000 to AFM4000-06 Combination Table/Accessory and Option Combinable Impossible Depends on the model Applicable mist separator Option Auto drain Sym Accessory/Option AFM2000 D D C 2 6 8 C J R W AFM3000 AFM4000 D D C 2 6 8 C J R W Pressure differential auto-drain Float style auto drain (N.O.)

Table of Contents

B C D R Model CDRBU2WU10-D 31 45.5 14 M5 x 0.8 CDRBU2WU15-D 25 47 18 M5 x 0.8 CDRBU2WU20-D 34.5 51 20 M5 x 0.8 CDRBU2WU30-D 47.5 55.5 22 M5 x 0.8 11-3-20 55 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Dimensions: 40 (With angle adjuster and auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B C D R Model CDRBU2WU10-D 31 45.5 14 M5 x 0.8 CDRBU2WU15-D 25 47 18 M5 x 0.8 CDRBU2WU20-D 34.5 51 20 M5 x 0.8 CDRBU2WU30-D 47.5 55.5 22 M5 x 0.8 11-3-20 55 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Dimensions: 40 (With angle adjuster and auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B C D R Model CDRBU2WU10-D 31 45.5 14 M5 x 0.8 CDRBU2WU15-D 25 47 18 M5 x 0.8 CDRBU2WU20-D 34.5 51 20 M5 x 0.8 CDRBU2WU30-D 47.5 55.5 22 M5 x 0.8 11-3-20 55 Series CRBU2WU Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Dimensions: 40 (With angle adjuster and auto switch unit) CDRBU2WU40-S/D Single vane type/Double vane type (mm) h Keyway dimensions l b CRB2 h (h9) l b (h9

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68

MHZ

D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model MHS 4 8 1 6.5 3 1.5 Open Closed Open Closed Open Closed Open Closed MHZJ2-10 With dust cover No setting No setting MHC MHZJ2-16 No setting No setting MHT MHZJ2-20 MHY MHZJ2-25 MHW Note) There is no auto switch protrusion from the body's end surface.

MHZ

Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S Courtesy