PFA/PFW

unit DIN rail 8-M3 3 x 7.2 ( = 21.6) 36 2-3.4 6.4 15 1 2 3 4 6.5 26 FLOW SWITCH SMC 35.5 m30 56 (4.5) 44 UNIT RESET SET 5 6 7 8 29 38 15.2 7 Series PFA Digital Flow Switch for Air Dimensions (mm)/ Separate Type For Air 1in=25.4mm Scale: 70 % PFA5 0-m m (N) 1 5 Sensor Unit 98 56 82 60 42 6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43

CLQ

4 !5 !

CLQ

1/4 Rear cylinder port Rc 1/4 Front cylinder port 10.5 13 Approx. 41 47 M10 x 1.5 effective thread depth 15 86 20 19 50 64 22 11 1.6 Minimum lead wire bending radius 10 Dust cover (manual unlocking unit) 6.6 Auto switch D-A7, A8 4-13 Counter bore depth 9.5 Rc 1/8 unlocking port (unlocks when pressurized) 17 50 64 4-11 Flat washer 4 pcs.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(Ms) 4 ports Stations 6 7 6 10 1t 12 13 14 15 16 17 t8 19 20 L1 1.32 (33.5)1.73 (44) 2.15 (54.5.i 2.56 2.97 3.39 (86) 3.& 4.21 (s6.s) (107) 4.63 (117.5) 5.04 5.45 (r28) (13s.s) 5.47 (149) 6.28 (159.5) (r7o) 7.11 (180.5) 7.52 (1er) 7.93 (201.5) 8.35 \212) 8.76 \222.5) L2 1.Oa \27.5) 1.50 (88) 1.91 t48.5J 2.32 (5s) 2.74 (6e.5) 3.15 (80) (90.5) 3.94 (10l) 4.39 (111.5) 4.& 5.22 (122) (i32.s)

o

(Ms) 4 ports Stations 6 7 6 10 1t 12 13 14 15 16 17 t8 19 20 L1 1.32 (33.5)1.73 (44) 2.15 (54.5.i 2.56 2.97 3.39 (86) 3.& 4.21 (s6.s) (107) 4.63 (117.5) 5.04 5.45 (r28) (13s.s) 5.47 (149) 6.28 (159.5) (r7o) 7.11 (180.5) 7.52 (1er) 7.93 (201.5) 8.35 \212) 8.76 \222.5) L2 1.Oa \27.5) 1.50 (88) 1.91 t48.5J 2.32 (5s) 2.74 (6e.5) 3.15 (80) (90.5) 3.94 (10l) 4.39 (111.5) 4.& 5.22 (122) (i32.s)

o

(Ms) 4 ports Stations 6 7 6 10 1t 12 13 14 15 16 17 t8 19 20 L1 1.32 (33.5)1.73 (44) 2.15 (54.5.i 2.56 2.97 3.39 (86) 3.& 4.21 (s6.s) (107) 4.63 (117.5) 5.04 5.45 (r28) (13s.s) 5.47 (149) 6.28 (159.5) (r7o) 7.11 (180.5) 7.52 (1er) 7.93 (201.5) 8.35 \212) 8.76 \222.5) L2 1.Oa \27.5) 1.50 (88) 1.91 t48.5J 2.32 (5s) 2.74 (6e.5) 3.15 (80) (90.5) 3.94 (10l) 4.39 (111.5) 4.& 5.22 (122) (i32.s)

Compact Cylinder with Lock Series CLQ

1/4 Rear cylinder port Rc 1/4 Front cylinder port 10.5 13 Approx. 41 47 M10 x 1.5 effective thread depth 15 86 20 19 50 64 22 11 1.6 Minimum lead wire bending radius 10 Dust cover (manual unlocking unit) 6.6 Auto switch D-A7, A8 4-13 Counter bore depth 9.5 Rc 1/8 unlocking port (unlocks when pressurized) 17 50 64 4-11 Flat washer 4 pcs.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) 15 27 57 86 160 224 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCUK N S NBR 40 50 40 50 Silicon rubber Urethane rubber Fluororubber Pad type U F E EPR 63 63 AMJ H Heavy duty 80 80 100 100 AMV Add NBR mass to the table on the right for other materials. 125 125 AEP Dimensions HEP ZP H 40 50 63 80 ZP H 100 125 ZP H Related Equipment 3 x 6.5 3 x 4 4 x 8 4 x 5 4 x 9.5 4

ZPT/ZPX

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

Compact 5-Port Solenoid Valve

4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

SX

When ozone enters or is generated in the air supply. 2 4 2 4 2 4 Applicable solenoid valves: Series SX3 0, SX5 0, SX7 0 3 5 7 20 40 X90 SX Model no. Entry is the same as standard products.

Cylinder with Lock

n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 45 50 55 60 70 D-A9mV n 45 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 50 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n =

10

Bore size [mm] d H B C D (Drill through) Applicable split pin Clevis Knuckle CD-M03Note 1) 32, 40 10 0.040 0.076 44 36 4 3 3 x 18 l CD-M05Note 1) 50, 63 14 0.050 0.093 60 51 4.5 4 4 x 25 l CD-M08Note 1) 80, 100 22 0.065 0.117 82 72 5 4 4 x 35 l IY-12Note 2) 125 25 0.065 0.117 79.5 69.5 5 4 4 x 40 l CJP NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40 M14 x 1.5 8 22 25.4 21 NT-05 50, 63 M18 x 1.5

VQC

N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

KR

(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

5 Port Solenoid Valve, Series VQC

N.C. 4-position dual 3-port valve (B) 4 2 1 5 3 N.O. N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

HRX-OM-Q026

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B Earth leakage breaker . 4-2 4.2.3 HRSH--20-B1 HRSH--20-S and HRSH--40. 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.2.5 Setting of pump operation mode . 4-3 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-4 4.4 Operation Start and Stop

Solid State Auto Switches

947-5-2, NECA 0402 Conformed standard 300 m/s2 Impact resistance IP67 (IEC60529 standard) Enclosure 100 M or more at 500 VDC measured via megohmmeter Insulation resistance 1500 VAC 1 minute (between contacts), Leak current 1 mA or less Withstand voltage M8-4 pin Dimensions Connector model 10 Sensor section M8-3 pin 4 pin 31.4 M12-4 pin 14 Sensor section M12-4 pin 44 Weight for Connector Type

Rotary Actuator/Vane Type

L1-(3 x P) X = L1 = X = Q2 = M CRJ CRA1 [mm] Size CRB2, CRBU2 Y L2 max Q2 10 5.5 to 8 Y-1 3 15 7.5 to 9 Y-1.5 3, 4 20 9 to 10 Y-1.5 3, 4, 5 30 11 to 13 Y-2 3, 4, 5, 6 40 14 to 15 Y-4.5 3, 4, 5, 6, 8 [mm] CRQ2 Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 7.5 to 14 X-3 3 5.5 to 14 X-1 3 15 10 to 18 X-4 3, 4 7.5 to 18 X-1.5 3 20 12 to 20 X-4.5 3, 4, 5 9 to 20 X-1.5 3, 4 30 14 to 22 X-5 3, 4, 5

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 6 4 8 (1) M5 X 0.8 SYJ300 Top (2) SY Body ported Base mounted Rc(PT)1/8 SYJ SYJ500 Top Rc(PT)1/8 VK (1) Rc(PT)1/8 SYJ700 Top VZ Rc(PT)1/4 VT (1) M5 X 0.8 SYJ300 Side VT Rc(PT)1/8 Bottom VP SYJ500 Rc(PT)1/8 Side VG Rc(PT)1/8 (1) SYJ700 Bottom Rc(PT)1/4 VP Rc(PT)1/4 Side Note 1) Only internal pilot style Note 2) Only external pilot style VQ VQZ VZ VS Series SYJ300 Series SYJ500 Series SYJ700