Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Note 3) 3/16" is made of brass (electroless nickel plated). AS2001FM-07, AS2051FM (6, 8, 1/4", 5/16") are made of PBT. Note 4) 3/16" is made of POM, stainless steel, and brass (electroless nickel plated).

Series AS-FM/AS-M/ASD-FM

Note 3) 3/16" is brass (electroless nickel plated). Note 4) 3/16" is POM, stainless steel and brass (electroless nickel plated).

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS-FG A (2) L2 (1) L3 T1 T2 H L1 D1 D2 Model Min.

AC

16 16 16 23 26 26 33 36 40 40 40 16 16 20 10 12.5 9.5 14.5 14.5 14.5 38.5 50 70.5 70.5 88 88 115 117.5 117.5 90.5 126.5 AC1020 AC2020 AC2520 AC3020 AC4020 AC4020-06 AC5020 AC5520 AC6020 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 181 191 225.5 230.5 309.5 323.5 323.5 Option For piping adapter AC2520, 3020, port size 1/2: 40mm For AC4020, port size 3/4: 50mm Metal bowl with level

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

53.4 7.6 17.2 49 47.6 17 22.5 12 16.1 17 21.5 24 7.8 16.2 16.4 AS2052FS-09 5/16" 15.2 13.5 57.2 8.5 18.1 49.9 48.5 19 18.4 AS3002FS-07 1/4" 13.2 12 4.5 8 16.6 20 59 9.8 21.7 55.7 54.3 21.8 25 12 20.5 17 24.5 28.5 9.3 19.2 23.6 AS3002FS-09 5/16" 15.2 13.5 65 19 26 AS3002FS-11 3/8" 18.5 16 69.8 21 38.1 AS4002FS-11 3/8" 18.5 16 4.3 8 18.8 26 76.9 11.3 23.7 64.3 62.7 28 33 14 26.2 21 26

Speed Controller with

36.2 34.6 17 22.5 12 16.1 17 12.1 AS2052F-09A 5/16" 15.2 13.5 56 8.5 18.1 37.1 35.5 19 13.8 AS3002F-07A 1/4" 13.2 12 4.5 8 16.6 20 57.8 9.8 21.7 42.9 41.3 21.8 25 12 20.5 17 17.9 AS3002F-09A 5/16" 15.2 13.5 63.8 19 20 AS3002F-11A 3/8" 18.5 16 67.6 21 25 AS4002F-11A 3/8" 18.5 16 4.3 8 18.8 26 74.7 11.3 23.7 51.3 49.7 28 33 14 26.2 21 36.7 AS4002F-13A 1/2" 21.7 20 79.1 22 40.4 1 Reference

LVQ

Nil M R N Connection tubing O.D. 1/8" (3) Connection tubing O.D. 4 Rc 1/8 NP T1/8 LQ1 integral fitting LQ1 integral fitting Threaded Threaded LVC LVA Applicable fitting size LVH Body class Symbol Fitting size 2 3 4 6 5 LVD Variations 07 11 13 19 25 2 3 4 5 6 LVQ20 LVQ30 LVQ40 LVQ50 LVQ60 Model LVQ Orifice diameter Applicable fitting size 4 8 10 16 22 LQ Symbol Type 2 3 4 5 6 Valve type Note

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Air Cylinder NCQ7 Series Compact Cylinder

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

asilltr

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

Speed Controller with

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

Speed Controller with One-touch Fittings

L5 L6 L7 L8 M1 1/8" 5/32" 1/4" 5/32" 1/4" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 8.4 9.3 12 9.3 12 13.2 15.2 13.2 15.2 18.5 18.5 21.7 36 37 39.5 40.7 42.6 53.4 57.2 59 65 69.8 76.9 81.3 4.5 5.2 6.1 5.2 6.5 6.9 8 7.4 8.2 9.8 10.3 11.3 11.2 11.9 12.8 12.3 13.6 16.5 17.6 19.3 20.1 21.7 22.7 23.7 23.8 24.5 25.5 28.9 30.2 33.4 34.5 38.6 39.4 41 51.6 52.6 21 21.7 22.7 25.4 26.7 28.4 29.5 33.6 34.4

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Booster Regulator Series VBA1110 to 4200 1

T [s] = (V/10) x (T2 T1 )/(Z) T [s] = (5/10) x (12 3.7) = 4.2 Increase number of booster regulators (Z) to decrease T. NO NO Extend stop time Ts up to charge time T or more. Judgement of charge time T Ts 4.2 29 YES YES When running continuously for a longer period of time, confirm the life expectancy.

Bag Filter

Material FGC AI-17S AI-18S FGF3-40 60 38 M16 x 2 Carbon steel FGF FGF FGF5-60 M20 x 2.5 70 46 Note) 16 pieces are required per filter unit. FGH Set of Components for Companion Flange (mm) (mm) FQ1 A B C D T1 Part No. Applicable model Material Flange dimension Applicable model Flange Hexagon bolt Applicable model E F T2 Part No. Gasket Part No.

Clean Regulator

If the wrench is applied on any other part, air leakage or other damage may occur. 862 Clean Regulator SRH Series Brackets For SRH3000 For SRH4000 Model B21-1-T1 1350112-T1 ARJ Material Rolled sheet steel (Electroless nickel plated) AR425 to 935 30 ARX 36 61 51 AMR 31 37 8.5 ARM Dimensions 10 ARP 21 20 28 6.5 8 IR-A 13.5 30 50 28 41 2.3 1.6 IR IRV VEX SRH SRH SRP SRF ITV IC ITVH ITVX PVQ

ASP-X352

L6 T2 A1 H1 L5 A3 T1 A2 Applicable A1 A2 A3 D1 D2 H H1 L1 L2 L3 L4 L5 L6 M T T1 T2 tubing Model number diameter d 6mm ASP330F-U01-06-X352 ASP330F-U01-07-X352 ASP430F-U02-07-X352 ASP430F-U02-08-X352 ASP530F-U03-10-X352 ASP530F-U03-11-X352 ASP630F-U04-12-X352 ASP630F-U04-13-X352 45.7 9.4 16.1 11.6 45.5 51.1 1/8 Uni G 1/8 14.2 14 29.3 14 13.7 38.4 22.9 26.9 34.6 to 39.6 1/4 1/4 63.6 10.4 23