MXQ

Retraction End (mm) Stroke adjustment range (mm) B C F G H J K 1) E D A Applicable size Model MXQ-AT6(L) 5 16.5 MXQ6(L) 17.5 19 10.5 6 8 7 2.5 M5 x 0.8 M2.5 x 6 MXQ-AT6(L)-X11 15 26.5 MXQ-AT8(L) 5 19.5 MXQ8(L) 21 22 12.5 8 10 8 3 M6 x 1 M3 x 8 MXQ-AT8(L)-X11 15 29.5 D H E MXQ-AT8(L)-X12 25 39.5 F MXQ-AT12(L) 5 23.5 MXQ12(L) M8 x 1 M4 x 10 28 29 16 16 10 12 4 MXQ-AT12(L)-X11 15 33.5 G MXQ-AT12

Metal Seal/Rubber Seal Series VQ Body Ported

Description Zinc die-casted Zinc die-casted Body Body w w Stainless steel Aluminum/HNBR Spool/Sleeve Spool valve e e Resin Resin Piston Piston r Pilot valve assembly r Pilot valve assembly Note) L M G 2 Note) L M G 2 VQ111(H) (Y) Voltage 1 to 6 VQ111(H) (Y) Voltage 1 to 6 Single Single VQ110L L M 2 VQ110L L M 2 Double (Latching) Double (Latching) Voltage 1 to 6 Voltage 1 to 6 Note) L M G

42

) port SMC VQC 1/2 VQC 4/5 37 41 50 98 PE X 18 31.5 VQZ 26.5 P R1 R2 16 27.5 41 41 27.5 SQ 1/8" External pilot port 1/8" PE. port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port VFS VFR 2-position double: VQ525 0 1-l G H 3-position closed center: VQ535 0 1-l G H 3-position exhaust center: VQ545 0 1-l G H 3-position pressure center: VQ5550 1-l G H 3-position double check: VQ565 0 1-l G H VQ7 194.5

e

1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 LC3F2 LC3F2 Speed (mm/s) Speed (mm/s) Speed (mm/s) Xm Xm Load Mass: E-MY2H (Single Axis) D-m D-m E-MY E-MY E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 E-MY2H16 4 4 E-MY2H16 4 E-MY2H16 3 3 3

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

H Grommet (G), (H): SYJ3140-l ll-M5 5 10 SY 33.5 Manual override 2-3.2 22 4 SYJ Depress and turn to operate and lock override.

Series VQ Base Mounted Metal Seal/Rubber Seal

Note 3) M5 fittings for M5 thread are attached without being incorporated. Kit/Electrical entry/Cable length F Kit (Flat cable connector) P Kit (Flat cable connector with power supply terminal block) G Kit (D-sub connector) Compatible only with 24VDC valves.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Air Slide Table Series MXQ

MTS Retraction End Applicable size Model Stroke adjustment range (mm) K 1) A B C F G H J E D 5 15.5 MXQ-CT 6 (L) MXQ 6 (L) 19 17.5 6 7 10.5 2.5 8 M2.5 x 6 M5 x 0.8 15 25.5 MXQ-CT 6 (L)-X11 5 18 MXQ-CT 8 (L) E D H 22 21 8 8 12.5 3 10 M3 x 8 M6 x 1 MXQ 8 (L) 15 28 MXQ-CT 8 (L)-X11 F 25 38 MXQ-CT 8 (L)-X12 5 22 MXQ-CT12 (L) MXQ12 (L) M4 x 10 M8 x 1 29 28 10 12 16 4 16 15 G 32 MXQ-CT12 (L)-X11

Stopper Cylinder

KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5

Rotary Actuator/Vane Style Series CRB1

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e Key 0 K K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o

Rotary Table/Rack & Pinion Style Series MSQ

Adjustment bolt B ta ro ro 5 (For clockwise rotation end adjustment) 5 9 e 9 se is e e wi g w g n k n k ra c oc ra o t cl cl en nt er er e tm m nt nt e is 0 u us t 0 u C w us o o k lo c o C dj C l 19 C 19 dj se c Cl A k A A wi w oc e e dj A ck is ng ng k dj o u wi e Cl st us se ro ra ra m ta ro t m ta ti d e ti n o on e n n e n nt nt en tio tio d ra ra 5 n n g ta e ta 9 g e 5 9 ro ro m

Rotary Clamp Cylinders

0 @5 w e @0 @3 !3 @9 #0 MK240 to 63 Head end flange (G) !

Hygienic Design Cylinder Series HY

: HYCB32 to 63 Cushion (Width across flats 4) W V W V Port U U 2 x P (Rc, NPT, G) Width across flats KA 2 x 4 x J G G MM HA D E E T H1 MB Width across flats B1 K C MA FA AL B N A F N H S + Stroke FB ZZ + Stroke CJ5 CG5 (mm) Bore size A Stroke range AL B B1 C D Ee11 F FA FB G H H1 MA MB J K KA MM N P S T U V W HA ZZ HY 32 40 50 63 500 or less 22 24 32 32 18 20 27 27 50 58 70 84 17 19 24 24

Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

KJ

, M6> <M5, M6> Weight (g) Model tubing O.D.

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Fieldbus System

q w e No.

Compact 5-Port Solenoid Valve

For EX600/EX250 pp. 63, 77, 119 1 3 5 S6 S JJ5SY 10 G P, E port entry, SUP/EXH block assembly P, E port entry External pilot U side (2 to 10 stations) G D side (2 to 10 stations) H Both sides (2 to 24 stations) J How to Order Valves JSY T 0 0 5 1 R 3 5 R JSY 0 0 5 Coil type (See below.)

Series SV

D G D SI unit SI unit Master unit D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V L2 L1 G Power supply 24V 0V LINE1 LINE2 SHIELD L1 L2 0V 24V Transmission lines SHIELD SHIELD L1 L2 FG 24V 0V L1 L2 FG 24V 0V Black White Brown Blue Terminal resistor Main transmission line Transmission lines Crimped connector SL-J1A Power supply 24V 0V Class 3 ground Class 3 ground 0V 24V G D G D Power supply 24V

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...