Pressure Range: 0~1MPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: Connector Style Lead Wire Length 3.0m

Pressure Range: 0~1MPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: Grommet Lead Wire 3m

Pressure Range: 0~1MPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: -

M-E05-1-LQ1

Tubing extensions size Nut Insert bushing Model Size Insert pin/Name plate symbol LQ1E2A-T 2 2-07 LQ1-2N07 LQ1-2B07 1/4" x 5/32" LQ1E3A-T 3 3-11 LQ1-3N11 LQ1-3B11 3/8" x 1/4" LQ1E4A-T 4 4-13 LQ1-4N13 LQ1-4B13 1/2" x 3/8" LQ1E5A-T 5 5-19 LQ1-5N19 LQ1-5B19 3/4" x 5/8" LQ1E6A-T 6 6-25 LQ1-6N25 LQ1-6B25 1" x 7/8" 5-15 A Tubing Extension Union Tee LQ1T-T T1 type T2 type Metric size C side Part

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1

CQ2

Bore size 12, 16 Bore size Standard stroke 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 20, 25 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 50, 75, 100 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Auto Switch Mounting Bracket Part No.

Made to Order

10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

Table of Contents

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

•

26 15 15 15 16 .

LVQ

(mm) Dimensions A C D M N S T U V B Model LVQ20S07-3 LVQ30S11-3 LVQ40S13-3 LVQ50S19-3 LVQ60S-V25-3 V S 25.5 46 31.5 58 7 15 83 34.3 10.6 7 V S 25.5 51 31.5 63 7 15 113.5 36.9 16.5 10 V S 25.5 51 31.5 63 7 15 119 37.9 22 10 V S 38 76 44 88 7 20 171.5 64 25 17 38 76 44 88 7 20 182.5 66 32 17 LVQ60 available only as V.

V

Area Differential MPa Pressure Differential MPa (mm2) MPa Water / Air Oil 0.02 3/8 15 VXD2142-03 4.5 80 0.7 0.6 0.02 1/2 VXD2142-04 15 5.5 100 1.5 0.7 0.6 0.02 3/4 VXD2152-06 20 9.5 170 0.7 0.6 Courtesy of Steven Engineering, Inc. !

Compact

Max. 3.0A Number ol setting posilions 28 Position setting method Setting with dedicated teaching box (LC5-1-T1-02) Position control method Absolute and incremental moves Speed: 6 to 200mny's (with feed screw lead of 12mm) Input signal capacity Optically isolated input 24VDC Max.

LX Series Compact Electric Actuators

Please refer to pages 42 and ,15 of this catalog for more intormation and precautions regarding the optional origin home switch.

V

15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42 25 47 7 Courtesy

AC

For AF/AL For AFM/AFD For AR B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t Bracket/ For AF, AL, AFM, AFD, and AR M4 X 8 l AF2000, AL2000 AFM2000, AFD2000 B240A 18 27 8.4 33 3 2.7 27 26 5.4 40 2.3 4.5 14 (Round head Phillips screw) Model File M4 X 8 l (Hexagon socket head cap screw) SAC2000, #15 SAC2503, #15 SAC4000, #15 SAC4006, #15 SAC5000, #15 B240 B340 B440

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

(Refer to pages 15-6-3 to 15-6-5 for details.) Note 3) Brass parts are all electroless nickel plated. The handle of the M5 type is black zinc chromate plated.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Note 3) Brass parts are all electroless nickel plated. The handle of the M5 type is black zinc chromate plated.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Model AS Applicable tubing O.D.