Rotary Table/

x 0.8 Rc1/8 End ports Port size M5 x 0.8 Side ports Note 1) The maximum operating pressure of the actuator is restricted by the maximum allowable thrust of the shock absorber.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2 LVA3 LVA4 LVA5 LVA6 66.5 11.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 Dimensions (mm) A B Q R P C E F G H K L N Model LVA1 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3 36 47 13 M6 x 1.0 42.5

Air Fittings & Tubing

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

One-touch Fittings

[mm] 1 D D Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2D04-M5G1 10 8.2 7.7 10 15.8 20.7 21.8 13.3 5.7 6 3.2 2.2 2.2 1.8 6.6 6 M5 x 0.8 KQ2D06-M5G1 12 10.4 9.7 12 16.8 21.7 23.9 13.3 6.7 6 3.2 4.3 4.3 1.8 9.8 Oval type N O 4, 6 M L1 1: D is maximum diameter.

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 pcs. 1 pc. n pcs.

Bernoulli Gripper

Selection example W = M x g x t x 1 n W : Required lifting force [N] M : Workpiece mass [kg] g : Gravitational acceleration [= 9.8 m/s2] t : Safety factor (Recommended value: 2 or more) n : Number of Bernoulli grippers [pcs.] Workpiece mass: M = 0.7 kg Safety factor: t = 2 Number of Bernoulli grippers: n = 2 pcs.

5 Port Solenoid Valve, Series VQC

1 2 3 4 5 6 7 Stations D-side 8 U-side M12 Female thread 2-C8 3(R) port 0 DIN rail clamp screw 1 62.5 60 (12) 40.5 25 9.5 7.5 18.5 M12 Male thread 20.5 (7.5) 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 93.5 n: Stations (maximum 16 stations) n L L1 L2 L3 L4

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5 15.5 29.3 46.5 ZPR16F-0-B5 ZPR25F-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x 1.25 Q: 4

Series SV

Tightening of fittings When connecting fittings, etc., to valves, tighten as indicated below. 1) M5 type 1. When using SMC fittings, follow the guidelines below. M5: After tightening by hand, tighten an additional 1/6 turn with a tightening tool. However, if miniature fittings are used, tighten an additional 1/4 turn with a tightening tool after tightening by hand.

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

CG5-S

(mm) Connection threads Connection threads Model Model KGU04-M5 M5 x 0.8 M5 x 0.8 KGT04-M5 4 4 -01 R 1/8 R 1/8 -01 -02 R 1/4 R 1/4 -02 KGU06-M5 M5 x 0.8 KGT06-M5 M5 x 0.8 -01 R 1/8 R 1/8 -01 6 <M5 type> 6 <M5 type> -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU08-01 R 1/8 R 1/8 KGT08-01 8 8 -02 R 1/4 R 1/4 -02 -03 R 3/8 R 3/8 -03 KGU10-02 R 1/4 R 1/8 KGT10-01 10 -03 R 3/8 R 1/4 -02

Vacuum Pad: Ball Joint Type

Female thread One-touch fitting 4 tube 6 tube 8 tube M5 x 0.8 1/8 (Rc, NPT, NPTF) 33 10 to 16 20 to 32 40, 50 30 32 133 128 139 159 158 167 Weight by Stroke (g) Pad dia.

Fieldbus System

End Plate type N Nil Positive common Negative common Note) Without SI Unit, the symbol is nil.

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

SZ3000

, indicate separately by the manifold specification sheet.

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

Aluminum High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

Title not found

23 & 24 1/4 1/2 1/4 Hex 9/32 5/16 Hex 5/32 1/8 NPT 3/8 M5 x 0.8 10-32 Thd 1/4 1/2 Hex M5 x 0.8 86 M5 x 0.8 to 1/8 (F) Adapter M5 Plain Plug M5 x 0.8 to 10-32 (F) Adapter Page 21 Distributed by Power Aire, Inc.

CQS

(Long stroke) M5 X 60 l M5 X 65 l M5 X 70 l M5 X 75 l M5 X 80 l M3 X 30 l M3 X 35 l M5 X 40 l M3 X 45 l M5 X 50 l M3 X 55 l 60 65 70 75 80 30 35 40 45 50 55 MU 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.