Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: C4L (One-touch Fitting ø4mm, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: D (Panel Mount Adapter + Front Protection Cover)

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: NPT 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: R 1/8, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: One-touch Fitting ø1/4", Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: One-touch Fitting ø6mm, Straight Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: One-touch Fitting ø6mm, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: One-touch Fitting ø4mm, Elbow Type, Option 1: Lead Wire w/Connector, 2m, Option 2: Panel Mount Adapter + Front Protection Cover, Option 3: -

3 Position Cylinder Series RZQ

RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

Table of Contents

360 around the stud axis For reducing R 1/8 female to M5. 1 8 For nylon tubing 1 8 R x M5 female M-5B 6/4 x R 6/4 x M5 M-01AN-6 P. 56 M-5HL-6 P. 58 P. 59 1 8 Plug Use to plug unused M5 port.

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 34.5 28 R P 26.5 B B B B B B B B 18.5 11 Note 2) P = 10.5 18.4 6 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: M5 thread (7.5) This drawing shows the case of VV5Q04-T2-D.

0.4

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

5 Port Solenoid Valve

5-M5 Port size M5 x 0.8 M5 M5 thread 58.5 P 50 Mounted on the manifold block to make an independent supply port when each solenoid valve uses different operating pressure.

0.4

C4 2-position 3-position exhaust center Option None With bracket Nil IN side port size OUT side port size 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) F M5 C3 C4 C6 N3 N7 M5 C3 C4 C6 N3 N7 M5 thread 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting M5 thread 3.2 One-touch fitting 4 One-touch fitting

Table of Contents

(4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-82 P. 2

Nozzle Type Ionizer

Parts p. 12 Options p. 13 Functions p. 14 Wiring p. 15 Power Supply Cable Connection Circuit p. 16 High flow rate nozzle Timing Chart p. 16 Dimensions p. 17 Related Product Intermittent Control Timer p. 20 Made to Order With Right Angles -X367 p. 21 Nozzle Variations p. 23 Female threads for piping Specific Product Precautions p. 24 Safety Instructions Back Cover 7 IZN10E Series

CNG

x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 P K KA M MM S NA PG PH PL LC LD LH LS LT LX LZ X Y W XA XB 5 6 3 M8 x 1.25 24 1/8 21.5 2 65 141

CNG

CL CL1 MLGC P 0.3 MPa Lock unit part no.

NVZseies

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

3 Way,3 Port Solenoid Valve NVZ Series

(M5)) (ln ca8e of % NPTF) M Vpe plug connector(M) L typ plug connector(L) 133S (340) ',3.A3 (3&) lo-32Nom. (Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O.

Plug-in Unit

, 3P) VQC101-5 T kit 1 to 10 stations M5 (M5 threads) S kit 1 to 8 stations: EX500 1 to 12 stations: EX250 1 to 8 stations: EX126 C10 (For 10) Options Direct outlet with built-in silencer Branch type C12 (for 12) F Kit: D-sub connector 1051 (Single) C4 (For 4) VQC200-5 P Kit: Flat cable VQC2000 VV5QC21C6 (For 6) Side 1144 (Double, 3P) T Kit: Terminal block box VQC201-5 C8 (For 8) S Kit