High Purity Chemical Valve Single type Suck back P P P TL/TIL A B A B Unit Single type Unit LQ3 Manifold (5 stations max.) A R P 3 port N.C. PA N.C.
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6
2 B 2 B 2 B 2 PE R 3 B 2 R 3 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P = 10.5 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 2n1-M5 x 0.8 (A, B ports) (L4) L3 (3.2) 101.2 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 (with switch mounted) DIN rail Manual
27 20 8 Bracket B Standard accessory (Mounting hole) M5 (or M6) (PD port) External release port plug Note 1) M5 (or M6) (P port) Air supply pressure port (55.4) 5.4 8 Air supply 1 (Mounting hole) (or M6) Vacuum pad connection port Note 1) Remove the plug at external release.
Port 2 (A) Port 1 (P) Port 3 (R) VEX350/370/390 (Solenoid) Pilot valve a Pilot valve b Port P1, P2 Port 3 (R) Port 2(A) Port 1 (P) VEX 1973 Series VEX3 Specific Product Precautions Be sure to read before handling.
PA A B Suck back (single type) Suck back (unit type) P P P A A B B With indicator Description Material Parts list No.
C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 X X 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 +
TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.
+ 0.77 (n: stations) Rc3/8 Rc1/2 Rc1/2 Rc3/4 22 Series VQ7-8 DIN Connector Type VV72-142 118 142 118 9 2n-Rc3/8, 1/2 67 20 Indicator light 14 34 9 (4-Rc1/8) Port P, R1, R2 for Rc3/4 only U side U side 18 Manual override 23 R4.5 R4.5 P= 56 60 (73) 60 (73) P= 56 B B B B B 14 42 18 13 13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side
size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy
15 R4.5 VZ P = 43 53.5 R side Manual override L side B VF B SMC SMC SMC 23 20 9 PA A VFR B B B VP4 PA A B L1 L2 VZS PA A Indicator light B VFS SMC PA VS4 A L3 B Release valve VQ7 PA A 38 EVS SMC VFN 142 (145.5 for MP) Pressure switch Control unit D side 9 124 89 AP: 1/4 Drain port 42.5 214 P 138 PA 14 PB 12 Supply port 3/8 1 84 65 R 3 5 54 (Pilot pressure EXH port) 4-1/8 39 P 21 SMC R2 R1
With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]
With external pilot specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16
A), 2(B) port VFR M5 x 0.8 Ground screw VQ7 117 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.7 3 1 69 55.5 53.7 45.5 12 X 4 A 4 A 4 A 4 A 4 A 4 A 4 A 35 34 22 13.2 19 15.5 69.5 1/2" 1(P) port 34.5 48 1/8" External pilot port 68.5 Bottom ported
Push button (Mushroom) VM122-M5-30R/B/G/Y VM132-M5-30R/B/G/Y Panel mounting hole JIS Symbol 2 port 3 port 2-M5 x 0.8 depth 4 R port (3 port only) 0.5 MPa supply 4.9 mm P.T. 21 N F.O.F. 1.6 mm O.T. 2-4.6 mounting hole 6.5 mm T.T.
CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.
n p c s 1 ) Multiple (2 pcs, or more) vertical mounting 31i. 24 and 's 89 ISE40 ZSE40 (zs-2+A) @ iul Bracket ffil ruI (zs-24-B) @ : R1/8 (with M5 female lhreads) : NPT1/8 (with M5 fernale Panel mounl C4i Wth o4 One-touch frtting ' C6: With oB One-louch fitting Panelmounl (2S,24-C) + Front protective cover * op!
( n p c s 1 ) ) Multiple (2 pcs, or more) vertical mounting 31i. 24 and ) 89 ISE40 ZSE40 (zs-2+A) @ iul Bracket ffil ruI (zs-24-B) @ : R1/8 (with M5 female lhreads) : NPT1/8 (with M5 fernale Panel mounl C4i Wth o4 One-touch frtting ' C6: With oB One-louch fitting Panelmounl (2S,24-C) + Front protective cover * op!
4-OA 4-OB counter bore depth OL XX section XX section L Through 4-NN WA Z X0.02 X0.02 DA DB VB VA R U X T H PW 2-P XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15