Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

Flow Control Equipment

(mm) JIS Symbol 3.2 23 04 06 08 10 Port size Style 4 6 8 10 M5 X 0.8 R(PT)1/8 R(PT)1/4 M5 01 02 Elbow Universal 2 3 Inch size: 1/8 Controlled method For low speed operation Meter-out Meter-in 0 1 With One-touch fittings 4.1-41 Speed Controller for Low Speed Operation Series AS-M Standard (Metal Body) Specifications Model AS12l0M-M5 AS22l0M-01 AS22l0M-02 Specifications Cylinder R(PT)1/8 R(

Table of Contents

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light/surge voltage suppressor, and the voltage is 24 VDC. kit (Serial transmission unit) kit (Lead wire cable) The dust-protected type SI unit is applicable

Series AP500

Surface finish Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) Code Pressure gauge unit 2) No code M V X Unit psig/bar MPa Code No code MPA 2) Pressure gauge unit MPa or psig/bar selectable. However under Japanese regulation, only MPa is available in Japan.

Direct Solenoid

Direct Solenoid Series NVS 3105, 4014/ 402/3/ 4/ 54 ,.,4:,.t .,r".,,,. 't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.'

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-5-45 for details.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

HRX-OM-X084

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

AIR COMBINATION

(with color zone) 0.2 MPa setting G36-4-01-L G46-4-01-L Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] Square Note2) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] embedded type 0.2 MPa setting Option NPN output Wiring bottom entry ISE35-N-25-MLAISE35-N-25-M (Switch body only)] Note 3 NPN output Wiring top entry ISE35-R-25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital

AR20-B to AR60-B

to 0.2 MPa setting G36-4-01-L G46-4-01-L Square *4 embedded type Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] NPN output, Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output

Series H, DL, L, LL Self-align Fittings

M H2 (Hex.) L2 L1 Thread R(PT) Part No.

2-Color Display Digital Flow Switch Series PFM

(2 m) Z Without lead wire with connector W With lead wire with connector (2 m) + Rubber cover for connector (silicon rubber) ZS-33-F S 1 2 ZS-33-D S 1 2 ZS-33-D IN IN Lead wire length 2 m Lead wire length 2 m Option 2 R Bracket (For without flow adjustment valve) S Bracket (For with flow adjustment valve) T Panel mount adapter (For without flow adjustment valve) Nil None ZS-33-J ZS-33-M

VZ3000

) L plug connector (L) VZ3240-L-01 M plug connector (M) VZ3240-M-01 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3240-D-01 Built-in speed controllers VZ3250Applicable cable O.D. 3.5 to 7 3-3-35 Series VZ3000 3 Position Closed Center/Exhaust Center/Pressure Center VZ3340 Grommet (G), (H) VZ3 20-01 G H 3 4 5 VZ3440 (Mounting hole) Manual

NCG/CG1

O knob M/O bolt M/O spring Stopper ring Note No.

30

21.4 24.9 M L Q A D D O N M M Note 1) D is maximum diameter.

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

JXCx-OMT0023

Program end 500[r/min] 200[ms] 300[ms] 600[10STMm] 300[10STMm] 700[r/min] 700[10STMm] 300[10STMm] a) b) c) d) e) f) a) Incremental move command (600 10STM m) 900 10STM m (a) MOVI (600) +e) TRIPI (300)) b) 300 10STM m d) Incremental continuous move command (700 10STM m) Forward rotation 0r/min Servo motor speed ON Program output 1 (OUT1) OFF c) f) 13 38 13.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181