2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 -m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181
10 0.1 Outlet50Hz Return port 0.0 0 10 20 30 Circulating fluid flow [L/min] Fig 9.6-1 Pump capacity(HRS018/030--20-R) 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R 0.8 80 0.7 70 available area Circulating fluid pressure [MPa] 0.6 60 Pump head[m] 0.5 50 Outlet: 60Hz 0.4 40 0.3 30 Outlet: 50Hz 0.2 20 available area 0.1 10 Return port 0.0 0 0 5 10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2
cable (3 m) With cable (5 m) Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) (2) (2) Kit P Kit P Kit F Kit F Max. 16 stations Max. 16 stations T kit (Terminal block) C kit (Connector) S The valve is equipped with an indicator light/surge voltage suppressor and the voltage is 24 VDC. kit (Serial transmission unit) The dust-protected type SI unit is applicable, too.
r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.
L3 L1 T L2 ASG32F-01 ASG42F-02 ASG52F-03 ASG62F-04 H (Width across flats) L4 Applicable tubing O.D. d L6 A D L5 M T L1 L3 L2 Max.
1fJ --c; " M5XO.8 ~ 'I t ~ flats 10 flats 19 I '..f I ~ Width across flats 8 " Width across I ~ M8Xl .25 flats 12 t=: ~-lf I F ,--. 0 1 " I , >-( I W I I >-1 , ~ / ! I / J JfL. I. !L M ,. Flat type Flat with rib (mm) Flat type Flat with rib mm M~ .. 'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ...
ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no. Note 3) Buffer assembly part no. Note 3) Pad unit part no.
Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-
2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.
AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.
e q t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.
Material Description Description q w e r t y u i o !0 !
Material Description Description q w e r t y u i o !0 !
With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit
With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit
Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire
21.0 K 8 15.2 18.5 20.5 25.2 27.0 42.6 11.4 28.6 10 18.5 21.0 M 19.5 12 20.9 22.0 18.0 24.0 27.0 25.0 38.5 41.4 55.0 Applicable tubing H 12.2 32.3 30.4 16 26.5 25.0 D MS T Elbow Socket Module: KBV H (width across flats) T Connection thread M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 A Weight (g) VMG L3 L2 L4 D1 D2 D3 L1 Model KBV1-M5 KBV1-M6 KBV2-M5 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 19.5
t q e OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.
Thread depth N Port size 2 x M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2 x P Port size (S) 2 x M Thread depth N L K N.C.