Modular F.R.L. Pressure Control Equipment

C3SF-J C4SF-J SMC C3SF-W C4SF-W K P C U O S L H o t C2SF-CJ C1SF-6 C2SF-6 C3SF-6 C4SF-6 A C2SF-6C The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AW.

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

New

4 1 H J M 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 Bracket mounting a b f g h i Port size P Model j 37 41 46 48 a1 Note) d e 2.3 2.3 2.3 2.3 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 56 56 70.5

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 (Plug: M-5P) 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68

Rotary Table/

(mm) Internal cross section a (mm 2) Nominal size = Length of piping [mm] a = Internal cross section of piping [mm 2] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4 2.5 4.9 [l (ANR)] QC = Air consumption required for one reciprocation of rotary table 6 4 12.6 8 5 19.6 8 6 28.3 6.5 33.2 7.5 10 44.2 12 8 50.3 12 9 63.6 9.2 66.5 16 12 113 12.7

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Rotary Table/Rack & Pinion Style Series MSQ

5.3 4 5.5 2 34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 3.5 M4 x 0.7 M5 x 0.8 7.5 2.5 6 4 5.5 3 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 4.5 M5 x 0.8 M5 x 0.8 7.5 2.5 6 5 5.5 7 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 4.5 (mm) JK P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 S WD M3 x 0.5 M3 x 0.5

Cylinder

---J Nil --Without auto switch 9O---D-90(O.5m lead wire) B Nose mount I I I T.

240

1 t !

Slider Type/Ball Bushing Bearing

Square nut insertion TW NL CY3B CY3R CY1S (mm) Model A 97 102.5 125 EB 21 22 24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5 28 J M5 x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x

Environment

0 i o e r t q u !1 !2 !3 !

CV/MVGQ

O.D. of cover : 1.7 mm Socket Coil ML2B Cover Hook For DC C J G5-S 3.

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

/

IN OUT M M 1 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port F I J K L I F J (D) DIN terminal: D Conduit terminal: T E (U) (V) E V U 32 31.5 25 (44) G1/2 T T G1/2 M M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port 2 x P 1 (IN), 2 (OUT) port I F J I F J With bracket 1 f 2.6 Bracket e 2 x 8.5 b a d (mm) Electrical entry Bracket mounting dimension Grommet Model Port size P Conduit DIN terminal

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

EI/.1, ,t,\/m @l/-, ,t,\tEE t r NVZCUUU Symbol CvO.7 w With Subplate Body po.ted type Base mounted tyPe with subplate NVZ5I20 NVZ5140 J J e4IrF 4uri{F NVZ5220 NVZ5240 r#T--n |r-,,.+ qlA.\lF qll,tr tFN Base mounted type NVZs3:O NVZ534O ^4T7fh rh. ,4TrnND* E l t / . 1 . . , 1 . \ { 6 @ t h L . 1 1 \ l @ __--?

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.