Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 (Plug: M-5P) 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Intrinsically Safe Valve

L 156 M5 x 0.8 (Pilot EXH port) Manual override 17.6 109.7 33.7 EA P EB PE X A A A A 24 23.6 20 20 65.4 5.3 20 29 7.3 68 39 B B B B 6 x 1/4" {P(1), EA(5), EB(3) port} 46.3 M5 x 0.8 (External pilot port) (Pitch) P = 17.5 21 L1 L2 5 Stations 1 n 2 47.5 53 38 27.3 8.5 9.8 2n x 1/4" {A(4), B(2) port} (Pitch) P = 17.5 19 L (Lead wire length) L-type plug

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

5 Port Solenoid Valve, Series VQC

Polarity Terminal no. () L SOL. A SOL. A (+) () (+) 1 1 Station 1 Station 1 SOL. B SOL. B (+) () () (+) 2 2 SOL. A SOL. A (+) () () (+) 3 3 Flat ribbon cable connector assemblies (optional) Station 2 Station 2 SOL. B SOL. B (+) () () (+) 4 4 SOL. A SOL. A Cable length (L) Part no. (+) () () (+) 5 5 Station 3 Station 3 SOL. B SOL.

3 Port Air Operated Valve Series SYJA300

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

CLQ

clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS NTJ-015SUS SNKJ-016SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

2 Phase Stepper Motor/Without Motor Brake Series LXS

(B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

MXW

Dimensions B A D C M (mm) Stopper bolt Stroke adjustable range (mm) 5 Applicable size B A C D M Model Lock nut MXW-A812 21 MXW8 8 M5 x 0.5 2.5 6 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 M5 x 0.8 2.5 6 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.

Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

CLQ

16 16 W Dust cover (Manual unlocking unit) L G B + Stroke A + Stroke Retraction locking LOCK VH1 W1 Dust cover (Manual unlocking unit) M5 x 0.8 unlocking port (Unlocks when pressurized) Rod end male thread H1 Rod end nut H2 X C1 L1 Stroke range Without auto switch With auto switch Bore size (mm) A G L M U VH VV W E H I K Q S D C A B B 61 68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 20 25 36

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Compact Cylinder with Lock Series CLQ

clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18