Air Cylinder

N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T

ZR

length 0.6 (3.0) m 27 (L) Lead wire length 0.6 (3.0) m D1 D2 50 60 D1 100 VAC ( Hz) 50 60 D2 110 VAC ( Hz) 26 (L) Lead wire length 0.6 (3.0) m D3 67 (L) Lead wire length 0.6 (3.0) m Pilot valve Electrical entry Vacuum switch electrical entry (E) Air operated Nil For 24, 12, 6, 3 VDC Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3.0

CJ2

Bore l Part No.

CJ2

Applicable bore (mm) Round type MM A D L R N W Flat type Applicable bore (mm) TDH10 TC TH TT TU TK TV TN TW TX TY TZ Part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Size: 10, 15 L T99 CDRBU2 W 180 S U With auto switch Size: 20, 30, 40 L CDRBU2 W 180 S T79 U With auto switch (With auto switch unit and built-in magnet) Made to Order Refer to the table below for details.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Series VQ Metal Seal/Rubber Seal Body Ported

Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, W, Y Q1 = M L1 + (3 x P) L1 = (mm) Q1 M3 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 Symbol: A2 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: S, W, Y d1 = Q1 = M L2 + (3 x P) L1 = L2 = (mm) Size 30 50 63 80 100 Q2 = M Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc1/8 Rc 1/4 2.5 4 5 4 5 6.8 (mm) (mm) d1 Size 30 50 63 80 100 100 Q2 M3, M4 M4, M5, M6 M4, M5, M6 M4, M5, M6, M8 M5, M6, M8, M10 Size 30 50 63 80 100 100 6.8 8.5 10.3 8 6.8 8.5 10.3 8 11 2.5 4 to 7 4.5 to 18 6.8 to 11 6.8 to 13

Battery-less

R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEFS25(L/R)EA 10 15 Lead 12: LEFS25(L/R)EA 10 Lead 20: LEFS25(L/R)EH 5 Lead 20: LEFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32(L/R)/Ball Screw Drive Horizontal Vertical 30 50 Lead 8: LEFS32(L/R)EB Lead 8: LEFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Table Displacement (Reference Value) L W 0.02 LEJ40 (L = 52.5 mm) LEJ63 (L = 64.5 mm) Displacement [mm] 0.01 0 0 100 200 300 400 500 Load W [N] Note) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

CQS

(N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

x 0.8 (Plug: M-5P) 4-M5 x 0.8 4-M4 x 0.7, depth 4.5 Bottom hole diameter 4.2 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting base side B D 12 9.5 Across AA MXP12-25B Without magnet and switch rail 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 8 5.7 3.5 6-M4 x 0.7, depth 4.5 20 20 L (mm) Model H M W J S Z K MA V L MXP12-15B 40 29 55 68

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.

CL

1.25 M14 x 1.5 Up to 200 Up to 300 Up to 300 Up to 300 15.5 19.5 19.5 27 M4 x 0.7 depth 7 4 5 5.5 6 6 8 8 10 12 16 10 14 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Without rod boot ZZ e f h l ZZ With rod boot Stroke range Bore size (mm) H1 WA WW WB WH H PG PH PL PW S TA TB P TC W 30 30 25 20 20 25 32 40 178 193 196 221 198 215 218 241 55 62 62 70 16 17 17 17 30 30 35 35 35 40 40

Compact 5-Port Solenoid Valve

0.1 W 1 Made to Order 0.4 W 2 The JSY1000 series is only available as the power-saving type.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(R)wYwC4, C6, M5 L plug connector (L): VQZ222 (R)wLwC4, C6, M5 VZS Indicator light VFS 135 <137> 300 VS (Lead wire length) 67.5 <68.5> VS7 32 <35.5> Pg.7 142.5 MAX.10 71.5 Applicable cord O.D.