LJ1H

-032 A1 A2 B1 B2 200 L2 Not required.

SV

Slave unit 75 Slave unit 03 Slave unit 01 Master unit ZW-31LM SI unit Master unit SI unit Master unit SI unit SI unit SHIELD SG L2 L1 SHIELD SG L2 L1 SHIELD SG L2 L1 SG L2 L1 + + FG + + FG + + + + + + SHIELD FG FG + Twisted pair wire with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground FG FG b) 3-wire type Wiring does not include signal ground line (SG).

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(L1) D side U side (L2) (DIN rail mounting hole pitch: 12.5) (5) Manual override Press and turn for the locking type.

Electric Actuator

LECSB1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Do not connect. L1 L2 L2 Main circuit power supply L3 L3 Regeneration converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.)

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

VQ5000

B 2 A 4 6 B 2 A 4 SMC SMC SMC SMC SMC 5 Cable length B 2 A 4 4 L2 L1 B 2 A 4 3 B 2 A 4 2 P=41 34.5 48 P=41 B 2 A 4 1 58.5 68.5 X 12 Stations D side 42 16 15.5 22 107.8 51 179 117 69 Electrical entry on D side (LD) 2-1/8 (external pilot port) Dimensions Formulas: L1 = 41n + 76, L2 = 41n + 96 L n 9 445 465 8 404 424 L1 L2 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1 117 137

KR

(mm) Model Note) L1 L2 P Q D 4.2 Nylon Urethane KGU06-00 KGU04-00 4 7 9 11 16 KGU08-00 KGU10-00 9.7 11.7 13.7 16.1 34 37 42.5 48 10.4 12.8 15.2 18.5 20.9 4.2 13.4 25.6 40 10.4 18 16 12.8 20 17 15.2 24.5 18.5 18.5 27.5 21 6 8 10 10.6 17.7 28.4 12 20.9 30 22 57.4 45.4 23 KGU12-00 18.1 51 Note) D: Max. diameter K 3-applicable tubing M H Different Diameter Union Y: KGU Applicable tubing O.D.

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

SY

(In this case, please note that dimensions L1 and L2 on pages 111 and 112 may vary.) Refer to page 113 regarding other parts.

VZS

Note) K plug connector DIN terminal 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC FS Plug-in With surge voltage suppressor D DIN terminal/With light /surge voltage suppressor KZ K plug connector With light/surge voltage suppressor DZ 6 12 VDC 9 Other KS K plug connector With light/surge voltage suppressor Note) Since F and K types are attached without lamp cover, it should be arranged

VQC

In the case of mixed wiring, use the option symbol "-K".

5 Port Solenoid Valve, Series VQC

In the case of mixed wiring, use the option symbol "-K".

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LECSB1: Single phase 100 to 120 VAC, 50/60 Hz Connection terminal: L1,L2 LECSB2: Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2 L1 L2 L2 Main circuit power supply L3 L3 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1,L2,L3 Regeneration converter Do not connect. N N P1 P2 DC reactor Connect between P1 and P2. (Connected at time of shipping.)

5 Port Solenoid Valve

Dimensions Formula: L1 = 25n + 106, L2 = 25n + 184 * L2 is the dimension without I/O Unit.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

B 2 A 4 6 B 2 A 4 SMC SMC SMC SMC SMC 5 Cable length B 2 A 4 4 L2 L1 B 2 A 4 3 B 2 A 4 2 P=41 34.5 48 P=41 B 2 A 4 1 58.5 68.5 X 12 Stations D side 42 16 15.5 22 107.8 51 179 117 69 Electrical entry on D side (LD) 2-1/8 (external pilot port) Dimensions Formulas: L1 = 41n + 76, L2 = 41n + 96 L n 9 445 465 8 404 424 L1 L2 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1 117 137

Vacuum Unit

V (R type) (K type) Vacuum pressure PV pressure can be changed per station.

Refrigerated Thermo-chiller

Note 10) Mass in the dry state without circulating fluids. 86 Thermo-chiller Series HRZ Cooling Capacity Heating Capacity HRZ001-L2/002-L2/004-L2/008-L2 HRZ001-L2/002-L2/004-L2/008-L2 1.6 10 9 1.4 HRZ008-L2 HRZ004-L2 HRZ002-L2 HRZ001-L2 HRZ008-L2 Heating capacity (kW) Cooling capacity (kW) 8 1.2 7 1.0 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 6 HRZ004-L2 5 0.8 4 0.6 3 0.4

15

Width across flats B1 MM [mm] Size B1 C1 H1 L1 L2 MM 25 22 20.5 8 36 23.5 M14 x 1.5 32 22 20.5 8 40 23.5 M14 x 1.5 63 27 26 11 72.4 39 M18 x 1.5 L1 L2 C1 H1 * The L1 measurement is when the unit is at the retracted stroke end position.

Compact 5-Port Solenoid Valve

Vacuum break flow adjusting needle Lock nut K Screwdriver operation type The slotted type allows for fine adjustment when the manifold or exhaust port type is used.