Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A1 + 2 (Stroke) L2 + Stroke L3 Flange Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) FD FT FV FX FZ L1 L2 M A B A B 64 40 5 to 50 40 74 50 5.5 8 54 62 72 17 7 40 74 50 75,100 66.5 40.5 10 to 50 50 76.5 50.5 6.6 9 67 76 89 18 8 50 50.5 76.5 75,100 68 42 10 to 50 63 78 52 9 9 80 92 108 18 8 60 78 52 75,100 For details about the rod end nut and accessory brackets

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 1.6 MPa, Piping: G 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: G 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: -, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: SI Unit Only, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: Operation Manual + Calibration Certificate

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration Certificate: -

Pressure Range: 0 to 1.6 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Straight, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration

IS3000

(When using switch with neon light: 1000 VAC for 1 min.) 50/60 5 3 4 0.4 3 2 3 0.4 0.1 0.1 How to Order IS3110 (Gasket piping) IS3010-02 (Rc 1/4 thread) IS3 0 02 L1 0 0 JIS Symbol Indicator light Piping method Nil L1 L2 L5 None With neon light/110 VAC With neon light/220 VAC LED/24 VDC Rc 1/4 thread Gasket piping 0 1 Micro switch load type Note) Micro load type: Not available L2 option.

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

AK Applicable tubing O.D. d L2 L3 M Inch size ASS ASR D2 L1 ASF T2 L4 H1 H1 (Hexagon width across flats) (Hexagon width across flats) H2 H2 (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 A1 L5 D1 A2 T1 Inch Size L4 Weight (g) d T1 D1 A2 A1 D3 M L3 L2 L1 H1 H2 D2 Max. Min.

Residual Pressure Release Valve

1/4 Rc 3/8 15.2 20.9 27 29 35.3 40 6 7.5 15.4 21.1 64 89 17 19 Weight (g) Connection thread D L1 L2 Q KEC-02 KEC-03 665

3 Port Solenoid Valve Series VQ100 1

= 10n + 7, n: Station (Maximum 20 stations) Dimensions S070 n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14

VQ

VQZ Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17

S Couplers

Width across flats Min. bore size Model T Connection port size Weight g Effective area mm2 L2 L1 KKA3P-01F-1 Rc 1/8 23.2 9.6 14 -02F-1 1/8 T Rc 1/4 6.0 22.6 16.0 30.3 20.2 17 -03F-1 Rc 3/8 32.0 26.2 19 KKA4P-02F-1 Rc 1/4 29.7 20.0 17 -03F-1 1/4 Rc 3/8 8.0 40.2 18.9 34.0 25.8 19 -04F-1 Rc 1/2 39.4 46.1 24 L2 H KKA6P-03F-1 Rc 3/8 30.9 34.3 22 L1 -04F-1 1/2 Rc 1/2 11.0 76.0 20.4 39.6 50.0 24

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.