Thread: NPT, Port: 2 [1/4", (1000, 2000)], Stations: 7 Stations, Pressure: 0.5 MPa, Protocol: Ethernet I/Pâ„¢

Thread: NPT, Port: 2 [1/4", (1000, 2000)], Stations: 5 Stations, Pressure: 0.1 MPa, Protocol: Ethernet I/Pâ„¢

Thread: NPT, Port: 2 [1/4", (1000, 2000)], Stations: 3 Stations, Pressure: 0.1 MPa, Protocol: Ethernet I/Pâ„¢

Thread: NPT, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 0.1 MPa, Protocol: Ethernet I/Pâ„¢

Thread: NPT, Port: 2 [1/4", (1000, 2000)], Stations: 4 Stations, Pressure: 0.9 MPa, Protocol: Ethernet I/Pâ„¢

Thread: NPT, Port: 2 [1/4", (1000, 2000)], Stations: 2 Stations, Pressure: 0.9 MPa, Protocol: Ethernet I/Pâ„¢

CV/MVGQ

) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 110 + 50 (n 4) 2 Different sides D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n

CV/MVGQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90

Clean Air Module

blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur Prevents traces of water droplets.

Series AP3500

How to Order (Inlet) (Outlet) AP 3 S FV4 FV4 M 571 2PW 050 Size Code Cv 0.29 0.5 Metered flow 3 4 Metered adjusted flow in slpm Code Metered adjusted flow in slpm at 80 psig (0.55 MPa) N2.

PFxx-OMJ0005CN

)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -31No.PF-OMJ0005CN-I [F 7] "0" [---] 0 30ms GND <> [F 7] [inP] [F 7] [F 1][F 2] -32No.PF-OMJ0005CN-I <> PFM710n_11.6H_10.4() ON/OFFONn_1 OFF(n

PFxx-OMO0004CN

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

PFxx-OMP0001CN

-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000

PFxx-OMS0001CN

-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A

Proposals for Energy Saving

Multiple units available with unit switching function Display units can be easily selected. mmHg kPa PSI kgf/cm bar Vacuum Positive Pressure MPa PSI kgf/cm bar Variety of switch output modes Sensors Measuring Instruments ON ON Hysteresis mode OFF OFF P2 P1 n2 n1 (Standard) (Inverted) Window comparator mode ON ON OFF OFF n1 n2 P1 P2 (Standard) (Inverted) Exact detection of atmospheric

Precision Clean Regulator Series SRP

Consistent clean room production Cleaned, assembled, inspected, and sealed in double packaging in a Class 10,000 environment Manufacturing process Applications Pressure feed of chemicals Parts assembly Precision clean regulator SRP Degrease cleaning Clean air Super mist separator Odor removal filter Clean gas filter Assembly Inspection N2 blow Precision clean regulator SRP Interior purge

AC Servo Motor Driver (Pulse input type)

[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AP500

kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.