Battery-less

Weight [g] LEC-CN5-1 170 LEC-CN5-3 320 LEC-CN5-5 520 171 Step Motor Controller For details, refer to page 182 and onwards.

REA/REB

Speed 600 mm/s REAS20 36.4 10.6 + 2Lo REAS15 15 5 4 74.4 12 + 2Lo 20 REAS10 3 140 13.8 + 2Lo 25 2 258 17 + 2Lo 32 520 20.6 + 2Lo 1 0 500 (650) 750 1000 1500 40 Cylinder stroke (mm) High Precision Guide Type REBH Order Made Auto Switches 3.

REA/REB

Horizontal Operation (Wall mounting) 50 30 Load weight W (kg) 20 REAS40 REAS32 10 (13.6) Bore size (mm) Allowable load weight WA (kg) 12.0 8.4 + 2Lo REAS25 REAS20 Lo: Distance from mounting surface to load center of gravity (cm) 10 REAS15 36.4 10.6 + 2Lo 5 4 15 74.4 12 + 2Lo REAS10 3 20 140 13.8 + 2Lo 2 25 258 17 + 2Lo 32 1 0 500 (650) 750 1000 1500 520 20.6 + 2Lo 40 Cylinder stroke (mm)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Bore size (mm) Allowable load weight (WA) (kg) 5.44 7 + 2Lo 50 Lo: Distance from mounting surface to load center of gravity (cm) 6 30 12.0 8.4 + 2Lo 10 CY1S40 CY1S40 20 36.4 10.6 + 2Lo Load weight (kg) CY1S32 CY1S32 15 10 (13.6) 74.4 12 + 2Lo CY1S25 CY1S25 20 CY1S20 CY1S20 140 13.8 + 2Lo CY1S15 CY1S15 25 5 4 258 17 + 2Lo 32 CY1S10 CY1S10 3 520 20.6 + 2Lo 40 2 3.

Table of Contents

Bore size (mm) Allowable load weight (WA) (kg) 5.44 7 + 2Lo 50 Lo: Distance from mounting surface to load center of gravity (cm) 6 30 12.0 8.4 + 2Lo 10 CY1S40 CY1S40 20 36.4 10.6 + 2Lo Load weight (kg) CY1S32 CY1S32 15 10 (13.6) 74.4 12 + 2Lo CY1S25 CY1S25 20 CY1S20 CY1S20 140 13.8 + 2Lo CY1S15 CY1S15 25 5 4 258 17 + 2Lo 32 CY1S10 CY1S10 3 520 20.6 + 2Lo 40 2 3.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

420 330 B 6 450 360 270 210 160 LEFS25 100 W /m40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340 B 8 500 400 310 250 200 170 LEFS32 200 W /m60 (Motor rotation speed) (3750 rpm) (3000 rpm) (2325 rpm) (1875 rpm) (1537 rpm) (1275 rpm) H 30 1500 1410 1140 930 780 500 500 A 20 1000 940 760 620 520

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm703 450 520 *1 The flow rate characteristics of this product vary. *2 The values were calculated based on the combination of an Rc or NPT thread and a grommet.

Slider Type Ball Screw Drive/11-LEFS Series

420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm) (3650 rpm) (2700 rpm) (2100 rpm) (1650 rpm) H 24 1500 1200 930 750 610 510 A 16 1000 800 620 500 410 340 B 8 500 400 310 250 200 170 LEFS32 200 W /l60 (Motor rotation speed) (3750 rpm) (3000 rpm) (2325 rpm) (1875 rpm) (1537 rpm) (1275 rpm) H 30 1500 1410 1140 930 780 500 500 A 20 1000 940 760 620 520

CY1

Bore size (mm) Allowable load weight (WA)(kg) 5.44 7+2Lo 50 6 Lo: Distance from mounting surface to load center of gravity (cm) 30 12.0 8.4+2Lo 10 CY1S40 CY1S40 20 36.4 10.6+2Lo CY1S32 CY1S32 15 10 (13.6) 74.4 12+2Lo CY1S25 CY1S25 Load weight (kg) 20 CY1S20 CY1S20 CY1S15 CY1S15 140 13.8+2Lo 25 5 4 258 17+2Lo 32 CY1S10 CY1S10 3 520 20.6+2Lo 40 2 CY1S6 CY1S6 CY1S6 3.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Note 7) The sensor unit conforms to the CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 45 Fluid temperature [C] Digital Flow Switch Series PF2D For Deionized Water and Chemicals How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Output specification 0 1 NPN open collector 2 outputs

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

min 0.1 l/pulse 0.05 l/pulse 0.5 l/pulse 1 l/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Linearity Repeatability Temperature characteristics Note 1) 0 to 50C 3% F.S. or less 5% F.S. or less 3% F.S. or less 2% F.S. or less 5% F.S. or less (0 to 50C, based on 25C) Current consumption (No load) Weight Note 2) 70 mA or less 80 mA or less 520

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

For Water Digital Flow Switch Series PFW

or more. 1 digit is the minimum setting unit (refer to the table above). 21 Series PFW How to order PFW5 20 03 Remote Type Sensor Unit Wiring specification Flow rate range Nil N 3m lead wire with connector Without lead wire 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Port size Thread type Size Applicable model Flow rate (l/min) Rc NPT G Nil N F Symbol 40 4 16 3/8 1/2 3/4 PFW504, 520

PF2D

Note 8) For details about wiring, refer to the Operation Manual that can be downloaded from SMC website (http://www.smcworld.com). 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 Made to Order 20 40 60 80 100 0 90 LQ1 series fluoropolymer fittings mounting type is also available. Refer to page 392.

Series PF2W Digital Flow Switch For Water

/min 0.1 L/min 0.05 L/min 0.5 L/min 1 L/min 0.1 L/pulse 0.05 L/pulse 0.5 L/pulse 1 L/pulse Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Operating fluid temperature Accuracy Repeatability Temperature characteristics Note 1) 0 to 50C 5% F.S. 3% F.S. 3% F.S. 2% F.S. 5% F.S. (0 to 50C, 25C reference) Current consumption (No load) Weight Note 2) 70 mA or less 80 mA or less 520

REA/REB

Horizontal Operation (Wall mounting) 50 30 Load weight W (kg) 20 REAS40 REAS32 10 (13.6) Bore size (mm) Allowable load weight WA (kg) 12.0 8.4 + 2Lo REAS25 REAS20 Lo: Distance from mounting surface to load center of gravity (cm) 10 REAS15 36.4 10.6 + 2Lo 5 4 15 74.4 12 + 2Lo REAS10 3 20 140 13.8 + 2Lo 2 25 258 17 + 2Lo 32 1 0 500 (650) 750 1000 1500 520 20.6 + 2Lo 40 Cylinder stroke (mm)

Air Slide Table

[g] Model Standard stroke [mm] Reduction of the shorter Additional weight of adjuster option Extra for option 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Buffer End lock Axial piping MXQ6A 61 66 80 89 97 6 10 8 30 10 total length type MXQ8A 68 76 85 97 116 138 6 10 8 30 10 MXQ12A 143 154 168 192 206 263 300 12 20 16 70 20 MXQ16A 240 257 277 309 329 389 469 520

PF2A/PF2W

600 to 12000 : Output from integrated display type and remote display unit type : Output from remote sensor unit type For Water P. 16-11-17 16 l/min 4 l/min 100 l/min 40 l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) Switch output Analog output Accumulated pulse output 3/8 1/2 1 3/4 Display unit Sensor unit PF2W504 520

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

MHY2/MHW2

-4 kgm2) Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 1.0 4 400 0.8 3 300 0.6 2 200 0.4 MHZ2 1 100 0.2 0 0 0 MHZJ2 0.1 0.2 0.4 0.5 0.3 0.1 0.2 0.3 0.2 0.4 0.6 0.8 1.0 1.2 Operating time (s/90) Operating time (s/90) Operating time (s/90) MHQ MHY2-16D MHW2-25D 3.0 20 MHL2 2.5 Moment of inertia (X10-4 kgm2) Moment of inertia (X10-4 kgm2) 15 2.0 MHR 10 1.5 MHK 1.0 5 MHS 0.5 0