Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

LEKFS25(L/R)/Ball Screw Drive Horizontal Vertical 20 30 Lead 6: LEKFS25(L/R)EB Lead 6: LEKFS25(L/R)EB 25 15 Work load: W [kg] Work load: W [kg] 20 Lead 12: LEKFS25(L/R)EA 10 15 Lead 12: LEKFS25(L/R)EA 10 Lead 20: LEKFS25(L/R)EH 5 Lead 20: LEKFS25(L/R)EH 5 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEKFS32(L/R)/Ball Screw Drive Horizontal Vertical

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 VC 15 16.5 28 14 12 6 4 VDW 20 23 36.5 17 18 9 5 F (E) VQ 2-B L M 24 28 43 21 18 9 6 VX2 1/4 H G 29 39 54 26 28 14 7 L L (E) (E) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

VFR

2 to 15 Plug-in type VV5FR2-01 VK VFR200-F 2 to 8 VFR210-G VFR210-E VFR210-T VFR210-D VFR210-L VFR210-M Note) Side/Bottom 1 4 VZ 1 4 1 8 C6, C8 , Non plug-in type VV5FR2-10 2 to 15 VF VFR Note) Side ported and bottom ported cannot be taken at the same time.

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

Internal hold External hold MHR2-10/MDHR2-10 MHR2-10/MDHR2-10 20 20 Pressure 0.6MPa Pressure 15 15 Holding force (N) 0.6MPa Holding force (N) 0.5MPa 0.5MPa External hold 10 10 0.4MPa 0.4MPa 0.3MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 L L Holding point L (mm) Holding point L (mm) MHR2-15/MDHR2-15 MHR2-15/MDHR2-15 Pressure 0.6MPa 30 30 Internal hold Pressure 0.6MPa 0.5MPa

39

30 45 60 75 90 105 120 135 None 15 30 Arm mounting position 45 Right L R Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

CLS

+ 1/2 stroke BV BZ BG BE e 4-MA Effective thread depth MB (To attach eyebolt) f l 15 h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 47 47 53 60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63

SMC Electronic Switch Series Variations

3.5 Mounting hole 2201: R(PT) 1/8 T1: NPTF1/8 01: R(PT) 1/8 T1: NPTF1/8 M5 X 0.8 Depth 5 M5 X 0.8 Depth 5 13 13 Dimensions/Base Mounted Style: ZSE2-0R Grommet style/ZSE2-0R-15 Connector style/ZSE2-0R-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 15 9 9 L H L H 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 30 25 30 (3000) (3000) 3 40 9.5 3 40

LEC-OM07605CN

(3) (a) LE-CSS-L [mm] (37.65) (13.4) (15) (6.7) (20.9) 8+0 +50 0 150 (2.3) (1.7) (b) LE-CSS-K, LE-CSS-J, LE-CSS-1, LE-CSS-3 (L)(1) [mm] () () (100) (100) L . LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr.

Modular Design with Uniform Body Style

ANR) Port size 3/8: 40 L/min (ANR) Port size 1/2: 50 L/min (ANR) Port size 1/4: 30 L/min (ANR) Port size 3/8: 40 L/min (ANR) Min. dripping flow rate*1 15 L/min (ANR) 50 L/min (ANR) 190 L/min (ANR) 220 L/min (ANR) Oil capacity 25 cm3 55 cm3 135 cm3 Recommended lubricant Class 1 turbine oil (ISO VG32) Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight

Cylinder with Lock

D-M9 D-M9W n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 10 D-M9V D-M9WV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9A n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-M9AV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 D-A9 n 15 + 40 (n 2) 2 (n = 2, 4

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

CNG

Material: Carbon steel Material: Carbon steel Material: Rolled steel d Dd9 Dd9 d d D C l m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

CNS

+ 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) C EA A AL B BN BP BQ CL D E F FA G GA GB GL GR J K KA 125 140 160 16 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 15 31 30 to 1000 18.5 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x

Modular F.R.L. Units

*15 *15 *15 *15 *15 *15 *15 ZA*14 Digital pressure switch: With unit selection function *16 *16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

Lightweight and Compact

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Pin Clamp Cylinders

10.5 25 4 4.5 9.8 6 6 13.3 542 C(L)KQG32/C(L)KU32 Series Options Dimensions Shim C(L)KQG32-X2081 C(L)KQG32-X2082 C(L)KU32-X2321 C(L)KU32-X2322 LOW type HIGH type LOW type HIGH type Guide pin fixing bolt () Guide pin fixing bolt () Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm) Guide pin fixing bolt () Guide pin fixing bolt () 100 + Shim thickness 100 + Shim thickness

MNB

For details, refer to page 9-15-40. 9-6-22 23 Cylinder with Lock Double Acting, Double Rod Series MNBW 32, 40, 50, 63, 80, 100 How to Order CL MNBW L 50 100 D Without auto switch CL1 MLGC With auto switch MDNBW L 50 100 D Y7BW CNG Number of auto switches Built-in magnet MNB 2 pcs.