2–4

5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

SL5200

Ports 2 ports 3 ports 4 ports Code w q w q 2PW 3PW 4PW 2) Refer to gauge guide (P.94) for gauge specifications. 2PW 3PW Sample Order Number Port r e SL5502S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications SL5502mmA SL5502 SL5510 SL5506 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 1 to 30

EXxx-OMZ0016

Problem 3 Red ON OFF Red Flashing W-SS W-SS LED flashes red or orange or is off Problem 4 Orange Flashing OFF Green Flashing Red Flashing Red ON W-NS W-NS LED does not turn on green. Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

ZX

The needle will fall out if it is turned more than 4 full turns. 1 Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Nil 6 VDC S 5 VDC R 3 VDC Applicable

Thermo-chiller

flow, r Power supply: 200 VAC 7 Standard Type Thermo-chiller Water-cooled 200 V Type Series HRS100/150 RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

How to Order Rated pressure range ISE20B 0 to 1 MPa ISE20B M5 L M For positive pressure For vacuum/ compound pressure ZSE20B L M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 100 kPa ZSE20BF 100 to 100 kPa Symbol Description Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function (Initial value psi)*1

REC

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Red (+), Black () Energy saving type/ Electrical power waveform (Rated voltage 24 VDC) Power saver Inrush 24 DC VX21 VX22 VX23 Model Rated voltage (V) Inrush 0 V Power consumption (W) 5 0.8 4 0.8 3 0.8 100 to 200 ms Holding (Equivalent to IP40 enclosure) Holding 0 W Model/Valve Specifications N.C. Normally Open (N.C.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Note) ( ): Denotes the dimensions for long stroke. 728 1011Series CG1W-Z 20, 25, 32, 40, 50, 63, 80, 100 Double Rod Cylinder How to Order 10 C D G 1 W L N 25 100 Z M9BW Mounting Number of auto switches B L F Basic Axial foot Rod flange Nil S n 2 pcs. 1 pc. n pcs.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Motor output [W]/Size [mm] 100/40 200/60 Motor type AC servo motor (100/200 VAC) Electric specifications Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

200 300400500 1000 1500 0.05 0.5100 200 300400500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-12-13 14 Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type/Cam Follower Guide Type Series MY1W 16, 20, 25, 32, 40, 50, 63 How to Order MY1M W K Y7BW 300 25 Number

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

CQS

(N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

MXF

(kg) Fig. (2) Overhang: Ln (mm), Correction Values for Moment Center Distance: An (mm) Pitch moment Yaw moment Roll moment W My Mr Mp W W W L3 A5 L1 A1 Adjusting bolt Static moment L2 A3 W MX Mp Mr My MTS W W W MY L1 A2 L3 A5 W L2 A4 CY Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5MPa Allowable Lateral Load at Rod End Standard type: MQQTB Lateral load resisting type: MQQLB/Built-in ball bushing 60 5 50 Maximum allowable lateral load W(N) Maximum allowable lateral load W(N) 4 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral

MGP

4 @1 w @3 !0 !2 @2 r o e @4 !0 y !3 12, 16 under 50 stroke 12, 16 over 30 stroke !5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1