FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Vacuum Pad: Ball Joint Type

20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25

Smooth Cylinder/Low Speed Cylinder

=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 35 + 35(n-2) 20 + 35 D-M9V 35 20 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 25 + 35(n-2) 15 + 35 D-A9V 25 15 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 D-M9WV D-M9AV 35 + 35(n-2) 20 + 35 35 20 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 50 + 45(n-2) D-C7 D-C80 15 + 45 50 15 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) D-H7 D-H7W D-H7NF (n-2) 2 60 +

VHS

with a warning tag. 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Body size 2 3 4 5 1/8 3/8 1/2 1 SMC Interface part is required if attached to a modular FRL.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

I 3 Width across flats 10 J Applicable tube O.D.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 125mm 65 x 250mm Bore size 04 06 Rc 1/2 Rc 3/4 2.

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 1 2 3 4 Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 34.4 1/8" 8.4 38 4.5 16.8 37.6 34.4 8.4 3.2 12.7 12.7 12 10.5 8 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 5/32" 9.3 39.2 5.2 17.4 38.2 35 9.3 4 3.5 3.5 12 8 10.5 AS1001F-05-3 AS1001F-06-3 40.7 6.2 18.5 39.3 36.1 13.5 3/16" 11.4 48.7 16.5 6 11.6 39.3 36.1 6.2 18.5 AS1001F-07-3 AS2001F-04-3 40.7 5.2 20.7 48 42.5 12.7 1/4" 12 40.7 13.7 4 9.3 14

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 34.4 1/8" 8.4 38 4.5 16.8 37.6 34.4 8.4 3.2 12.7 12.7 12 10.5 8 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 5/32" 9.3 39.2 5.2 17.4 38.2 35 9.3 4 3.5 3.5 12 8 10.5 AS1001F-05-3 AS1001F-06-3 40.7 6.2 18.5 39.3 36.1 13.5 3/16" 11.4 48.7 16.5 6 11.6 39.3 36.1 6.2 18.5 AS1001F-07-3 AS2001F-04-3 40.7 5.2 20.7 48 42.5 12.7 1/4" 12 40.7 13.7 4 9.3 14

SV

) 3 (EB) 18 or less 29 or less 32 or less 82 or less 3 position 15 or less 33 or less 4 position dual 3 port valve 4 position dual 3 port valve: N.C.

LEC-OM02904

PD01 0h PD02 0h PD03 0h PD04 0h PD05 0h PD06 0h PD07 *DO1 1(CN3-13) 0005h CN3-13MBR 0 0 CN3-13 CN3-13 00 OFF 0A SA(2) 01 (3) 0B VLC(5) 02 RD 0C ZSP 03 ALM 0D (3) 04 INP(14) 0E (3) 05 MBR 0F CDPS 06 DB 10 (3) 07 TLC(4) 11 ABSV(1) 08 WNG 121F (3) 09 BWNG 203F (3) 1. OFF 2. OFF 3. 4. OFF 5.

HEC-OM-S008

0050 0 A9 [CR][LF] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Series HAW Water Cooled Aftercooler 1

HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 B C D E F G H J K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354

Compact Manifold Regulator

Note 3) This option is available with the digital pressure switch. 732 Compact Manifold Regulator ARM11A/B Series Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type ARJ 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.

ARM10/11

ARM10 06 B Z 1 AV AU 1 2 3 4 1.