Modular F.R.L. Units

Refer to the attachment table on page 34 for standard port sizes when using with the AC. Caution on Mounting If a T-spacer is used on the inlet side of the lubricator, lubricant may be mixed.

HEC-OM-S008

Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Reading offset No 05 36 33 36 0D 02 36 2D 31 35 32 03 3F 3B 0D Answer -1.52 deg.C 36 Offset setting (without writing FRAM) No 02 36 30 31 35 30 03 3F3C 0D 06 0D Set at +1.50 deg.C 37 Temperature setting (with writing FRAM) No 02 37 32 35 30 30 03 3F3E 0D 06 0D Set at 25.0 deg.C 38 Offset setting (with writing

Modular F.R.L. Unit

Threads for IN and OUT ports are not machined. 40 40 28 11 11 AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 1/8, 1/4 AKM2000 53 48 34 14 13 1/8, 1/4 AKM3000 70 54 42 18 15 AKM4000 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

/8 1 port 1/8-2 port 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5 32.5 29.5 37 34 2-4.6 mounting hole Manual override 2-4.6 mounting hole Manual override 37

VM

06 VA Cross roller plunger 07 Piping direction and the length of push rod 0 Long Side ported Height of rod push Bottom ported Toggle lever 08 1 Short 2 Long 3 Short SA Push button (Mushroom) 30 Actuator 1 0 Short Long Side ported Push button (Extended) 32 00 x x x x x x x x x x x x x x x x x x x x x x x x Basic Push button (Flush) 33 VA 01 02 05 06 07 08 30 32 33 34

Cylinder with Lock Series MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

Compact Cylinder with Air Cushion and Lock Series RLQ

11.2 Rod end nut 38.5 Front flange/RLQF40 40 54 8 17 95 + Stroke 4-5.5 62 72 34 44 + Stroke Rod end nut 38.5 Rear flange/RLQG40 40 54 4-5.5 8 93 + Stroke 7 34 44 + Stroke 62 72 Rod end nut 28.5 Double clevis/RLQD40 4-M5 x 0.8 Cap bolt 6 Hole: 10 H10 Shaft d9 14 10 22 7 107 + Stroke 117 + Stroke 34 44 + Stroke 18 +0.4 +0.2 36 -0.1 -0.3 Rod end nut 28.5 8 Series RLQ Dimensions/50 (Emergency

PSxx-OMV0008CN

ON/OFF (34 ) ON/OFF 34 85 85 ON OFF Hysteresis / () () 25[]ON-OFF -12No.PS-OMV0008CN-E NPN () () ON ON 0 34 ON-OFF ON () (P1L~P1H)ON (34 ) () digit () () SI ON/OFF ON-OFF / ON/OFF 90 ON -13No.PS-OMV0008CN-E ON () (n1L~n1H)ON (34 ) 34 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000) () () F () ripple -14No.PS-OMV0008CN-E ( M46L(2)) 0.760.1 Nm A(ZS-

3 Port Solenoid Valve/

View A M12 connector e w r Pin number q 22 VG342-X87 Dimensions Dual Residual Pressure Release Valve (-X87) VG342(R)-5DZ-10 -M -X87 75.3 75 Safety limit switch Made by OMRON 34 74 Port size: 1/8" (Without check valve) Applicable tube O.D.: 8, 5/16" (With check valve) (External pilot port) Channel 1 Channel 2 64.5 Safety limit switch (made by OMRON) Part number: D4N-9B31 M12 x 1 A 34 Applicable

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

VQC

or less 44 or less Rubber seal VQC2301 (A) 4 (B) 2 2.0 2.6 0.15 0.46 0.15 0.60 29 or less 38 or less Metal seal VQC2400 Exhaust center 110 2.0 3.2 0.28 0.49 0.30 0.80 34 or less 44 or less Rubber seal VQC2401 1 (P) 5 (R1) 3 (R2) 2.4 2.0 0.17 0.57 0.18 0.46 29 or less 38 or less Metal seal VQC2500 Pressure center 3-position closed center 3.2 2.2 0.28 0.80 0.31 0.60 34 or less 44 or less Rubber

MXS

16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Refer to "Dimensions" of MXS25 on p.3.11-23 for one with shock absorber as symmetric.

Air Cylinder

Width across flats WH GA WA GB WB W 10 CG1 CG1 CG3 JMB MB MB1 With rod boot 8 8 h + l 8 h + l CA2 CS1 IJ IJ e e CS2 JH f f l l JW ZZ + l + Stroke Z + l ZZ + l + Stroke Z + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D H H1 I J K KA LC LD LH LS LT LX LZ M MM Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 34

7

CK1 CK1 45 CLK2 Clevis pin 6 60 9 CLKG 12 60 48 CKQ CLKQ Pedestal CK CLK KZZ KL2 KY KS CKQ Pedestal 15 80 K 35 45 50 30 95 KL1 16 5 50 KC 15 KX 25 34 KZ 57 Material: Rolled steel Unit: mm KZZ CKG50 CKP50 CKG63 CKP63 Option symbol Applicable clamp cylinder K CKG40 CKP40 KL1 KL2 KS KX KY KZ KC Part no.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) G H2 G H1 Width across flats B1 MM FZ FX Eh8 D I 20 to 32 Width across flats KA Relief port (10-, 21-) Vacuum port (11-, 22-) (32,40) Standard port 45 Width across flats NA FT K A AL 1.5 Z H ZZ + Stroke S + Stroke F FY 4 x FD 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

7

Refer to page 118 for details. 140 Pilot Operated 2 Port Solenoid Valve VXD Series Air Air Oil Water 3 A Dimensions/VXD2 Body Material: Aluminum, C37, Stainless Steel Conduit terminal (U2) E (V2) 34 VX2 VXK 32 25 T VXD VXD VXZ A B M M G1/2 OUT IN VXS J F I 2 x P Port size VXB L K (D) VXE VXP VXR Conduit VXH E U 280 C 23 T VXF VX3 G1/2 B A A B VXA VXD2 C F 3 A OUT IN 3 A Note) Only the

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

MQQ

8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18 10 5 20 10 to 60 47.5 M6 x 1.0 37.5 10 10 40 5.5 M5 x 0.8 7 52 8 10 28 5.4 9 19.5 10 6 25 10 to 50, 75, 100 54 M6 x 1.0 42 12 12 45 8.5 M6 x 1.0 7 60 4.5 10 12 34 5.5 9 23 10 49.5 7 28 10 to 50, 75, 100 60.5 M6 x 1.0 48.5 13 16 52 8.5 M8 x 1.25 7 69 5 14 12 40 5.5 9 26 10 57 10 With rod end male thread: MQQDM Rod end nut H1 Bore size (mm)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.