15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Battery-less

B C Radial clearance M W A Table 1 B side parallelism to A side Model LESH25 Model Stroke [mm] B side parallelism to A side [mm] Refer to Table 1. 50 75 100 150 B side traveling parallelism to A side [mm] Refer to Graph 1.

Electric Actuator/Slider Type

Drive: Vertical LEJS63/Ball Screw Drive: Vertical LEJS40 H LEJS63 H 20 20 Acceleration/Deceleration [mm/s2] Duty ratio: 50% Acceleration/Deceleration [mm/s2] 15000 15000 Duty ratio: 100% Duty ratio: 100% Duty ratio: 75% 10 10 Duty ratio: 75% Duty ratio: 50% 5000 5000 Duty ratio: 25% The value of 50% or less is the same as duty ratio 50% 0 0 0 1 2 3 4 5 6 0 1 2 3 Work load [kg] Work load

MY1

M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 (LL) 40 50 53 70 85 LW 60 78 90 110 121 M 7 8 9 13 13 N 20 25 30 37 45 Model MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 PC 7.5 14.5 14.5 15 20.5 PD 21 27 32 42 37.5 PA 40 50 60 80 100 NC 13.5 17.5 20 25 30.5 PF 3.5 4.5 5.5 6.5 8 PB 40 40 50 60 80 NE 27.8 34 40.5 50 63 Q 153 191 206 264 322 NG 13.5 17.5 28 33 42.5

Table of Contents

8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

MG

-www.stevenengineering.com 16 16 12 12 1 1 0.1 0.1 10 50 100 200 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 50 50 10 10 40 Load weight m (kg) 40 Load weight m (kg) 5 5 32 32 25 25 20 1 20 1 16 16 12 12 0.1 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric

Cylinder with Lock

n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)*1 75 + 50 (n 2) (n = 2, 4, 6, 8)*1 80 + 50 (n 2) (n = 2, 4, 6, 8)*1 85 + 50 (n 2) (n = 2, 4, 6, 8)*1 Double Acting, Single Rod Double Acting, Double Rod 1 70 75 80 85 D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F

CL

1/4 Stroke 1/4 Stroke 1/4 Stroke 40 50 63 80 100 14 18 18 22 26 71 80 99 117 131 11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 1/4 3/8 3/8 1/2 1/2 6 7 7 11 11 MGQ MGG MGC CLAB40SCLA40, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB63SCLA63,

MY1

50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With connector cable Note 1) W 50 60 4 220 VAC Hz [230 VAC Hz] 50 60 50 60 For type W, DC voltage is only available.

10

Note 1) 75 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8) Note 1) 1 70 75 80 85 90 D-F5l/J59 D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 90 95 110 115 120 130 n (Same surface) 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 55 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Brake 50W 100W 200W 1 2 3 None With brake Nil K Power supply voltage Stroke 100/110VAC 50/60Hz 100/115VAC 50/60Hz 200/220VAC 50/60Hz 200/230VAC 50/60Hz Without motor Lead screw lead 1 H B C F A D E 8mm 12mm 20mm 5mm 10mm 25mm 40mm 2 0 Lead screw type The tables above show the definition for each symbol only and cannot

Stability of suction position,

Mounting thread size 32 to 50 ZP3E-(32 to 50)UMll M10 x 1 8 to 10 ZP3E-(32 to 50)BMll 63 to 125 ZP3E-(63 to 125)UMll M16 x 1.5 13 to 15 ZP3E-(63 to 125)BMll Note 1) When mounting and removing the seal washer, rotate the set screw while the seal washer is being held.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 20 25 32 40 50 63 80 100 Without rod boot With rod boot on one side With rod boot on both sides Bore size (mm) TA Air-hydro TC H 35 40 40 50 58 58 71 71 ZZ 147 157 159 187 218 218 264 264 e 30 30 35 35 40 40 52 62 f 16 17 17 17 17 18 10 7 h 55 62 62 70 78 78 80 80 IJ 27 32 38 48 59 72 59 71 JH

High Vacuum Angle Valve

How to Order [Option] XLCV M9N A 16 1 G L Flage size 16, 25, 40 XLCV M9N A 50 1 1 G Flage size 50, 63, 80 XLCV q r t w y e u i o !1 !

VFS

Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

2/3 Port Valve

Rated voltage 2 200V AC 50/60Hz 1 100V AC 50/60Hz Port size Model 3 110V AC 50/60Hz 1 4 3 8 1 2 3 4 2232 02 {Rc(PT) } 4 220V AC 50/60Hz 2232 03 {Rc(PT) } 5 24V DC 2242 04 {Rc(PT) } 6 12V DC 2352 06 {Rc(PT) } 7 240V AC 50/60Hz 2362 10 {Rc(PT)1} 8 48V AC 50/60Hz Select a model according to the connection size and flow characteristics chart on p.4.1-80. 9 Other (Contact SMC for inquiry.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port size (A, B port) VQ7 Type of actuation Nil Non-locking push type 1 Single solenoid 2 Double solenoid 1 8 02 01 Rated voltage B Locking type B EVS 1 4 C Locking type C 1 2 100 VAC, 50/60 Hz 3 Closed center R port of VF370 is Rc. 200 VAC, 50/60 Hz 4 Exhaust center VFN 3 5 Pressure center 110 V to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 4 4 Light/Surge voltage suppressor 5 24 VDC 12 VDC

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical LEJS40H LEJS63H 20 20 LEF Acceleration/Deceleration [mm/s2] Duty ratio: 50% Acceleration/Deceleration [mm/s2] LEJ 15000 15000 LEL Duty ratio: 100% Duty ratio: 100% Duty ratio: 75% 10 10 LEM Duty ratio: 75% Duty ratio: 50% LEY 5000 5000 Duty ratio: 25% LES The value of 50% or less is the same as duty ratio 50% LEPY LEPS 0 0 0 1 2 3 4 5 6 0 1 2 3 Work load [kg] Work load [kg] LER