INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

DIN (EN175301-803(C)) terminal Z With light/surge voltage suppressor *1 For AC voltage valves there is no S option.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

SY

(16 outputs) S-Link (8 outputs) T Link Mini DeviceNet CompoBus/S (16 outputs) CompoBus/S (8 outputs) JEMANET J1 J2 K Q R1 R2 U V CC-Link SS5Y3-45SA-05U-C6. 1 set (Type 45S, 5 station manifold base with serial unit part no.)

CXS

stick-slip even at 5 to 50mm/s.

0.4

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit (Circular connector) T kit (Terminal block box) S kit (

Free Mount Cylinder

T S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] Note LE-CP-1-S 190 Standard cable LE-CP-3-S 280 LE-CP-5-S 460 LE-CP-1 140 Cable color Connector D terminal no.

0.4

Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

42

D0 D1 D2 U0 U1 U2 1 to 16 stations Kit L Kit L SD S Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 output points) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) CC-Link Note 1) For the T kit and S kit, 2 stations are required to mount the terminal block

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

CL

Rod side flange style Foot style Basic style S + Stroke With air cushion LS + Stroke S + Stroke ZZ + Stroke ZZ + Stroke ZZ + Stroke S + Stroke Without rod boot With rod boot Without rod boot With rod boot S Without rod boot With rod boot S Bore size (mm) Stroke range WB S Bore size (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 LS Bore size (mm) Stroke range 201 to 350 301

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0.43 0.73 0.63 0.73 0.2 JSX21-S Cm503 320 360 7.1 3.15 0.44 0.88 0.76 0.88 0.1 JSX21-S Cm703 320 360 3/8 1/4 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm402 450 490 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm502 450 490 7.1 3.15 0.44 0.88 0.76 0.88 0.2 JSX31-S Cm702 450 490 30 3/8 4.0 2.02 0.48 0.52 0.45 0.52 1.0 JSX31-S Cm403 450 520 5.6 2.62 0.43 0.73 0.63 0.73 0.5 JSX31-S Cm503 450 520

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load weight kg Load weight kg m s m s Type of impact s m 1 2 m2 Kinetic energy E1 Thrust energy E2 Fs Fs + mgs Fs mgs Absorbed energy E E1 + E2 Symbols : Speed of impacting object (m/s) m: Mass of impacting object (kg) F: Cylinder thrust (N) g: Gravitational acceleration (9.8 m/s2) s: Shock absorber stroke (m) Note) The speed of the impacting object is measured at the time of impact

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

rod extension rod retraction OFF OFF OFF Locked stop SOL.A SOL.C SOL.B 0.5 s or more 0 to 0.5 s W ON OFF OFF Unlocked ON OFF ON Backward SOL.C SOL.B 2) [Vertical] Load in the direction of Load in the direction of SOL.B rod extension rod retraction SOL.A SOL.C W W SOL.A Note) The basic circuit examples are for spring locking (exhaust locking).

C76

: C76RAY Without magnet, Built-in magnet Bore Stroke B S + Stroke ZZ + Stroke (mm) LD AM B C D EE G1 H K KK L LH LX N1 N2 NB NDh8 S SW WH XB ZZ 116 Bore 26 0 0.033 32 40 20 24 42.3 52.3 12 14 37.5 46.5 G1 /8 G1 /4 22 27 36 40 10 12 47 58.5 21 26 30 38 29 38 17 22 34.5 42.5 80 105 17 19 16 16 28 31 M10 x 1.5 9, 14 depth of counter bore 10 32 0 0.039 M12 x 1.75 11, 17.5 depth of counter bore

MVGQ

Built-in magnet for auto-switches CE1 CE2 Maximum Driving Speed of Cylinders ML2B 1000 1000 900 900 C J G5-S Load factor: 10% Load factor: 50% 800 800 Cylinder speed (mm/s) Cylinder speed (mm/s) 700 700 600 600 CV 500 500 400 400 MVGQ 300 300 200 200 CC 100 100 0 0 12 16 20 25 32 40 50 63 80 100 RB SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) J Series Variations DDetailed specifications

C76

High Speed Actuation Low friction and the standard elastomer cushion seals allow piston speeds up to 1500 mm/s. Either rubber bumper or air cushions are available.

CNG

Maximum piston speed: 1000 mm/s It can be used at 50 to 1000 mm/s provided that it is within the allowable kinetic energy range.