CXS

With Air Cushion: CXS Vertical mounting L L Mounting orientation m m up to 200 up to 1000 up to 400 up to 600 up to 800 Maximum speed (mm/s) Stroke (mm) All strokes 20 Selection graph 1 2 3 4 5 25 32 Horizontal mounting L Mounting orientation m m Refer to the caution notes below. up to 75 up to 10 up to 30 up to 50 Stroke (mm) up to 100 up to 1000 up to 800 up to 1000 up to 1000 up to 800

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

CNG

1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200 40 100 100

AC

T[s] = (V/10) X (T2 T1)/(Z) T(s) = (4.8/10) X (12 3.7) = 4 NO NO Increase number of booster regulators (Z) to decrease T.

3

F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

Cylinder with Lock Series MNB

B2 H S + Stroke ??

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

MQQ

to 1000 mm/s (Refer to page 10-5-7.) (3) Piston speed H (High speed/High frequency type) 5 mm/s to 3000 mm/s (Refer to page 10-5-7.)

VFS

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 40 50 63 80 100 125 140 160 180 200 Average speed (mm/s) System VK 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 VZ A VF VFR 0 1000 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000) (900) (1000) (900) MY1CW20 MY1CW20 MY1CW16 MY1MW16 MY1MW16 MY1MW16 MY1CW16 MY1CW16 (900) (900) (900) Caution 20 20 10 10 1.

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

MXQ

75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of Adjuster Option (Identical for extension and retraction ends) Optional wide adjustment range adjuster are available with rubber

C95Series

1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .

Cylinder with Lock Series CNG

1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200 40 100 100

ZP

Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W