C76

1 to 50 12.5 12.5 51 to 100 25 25 101 to 150 37.5 37.5 151 to 200 50 50 201 to 300 75 75 301 to 400 100 100 401 to 500 125 125 1 to 50 57 64 51 to 100 70 77 101 to 150 82 89 151 to 200 201 to 300 120 127 301 to 400 145 152 401 to 500 170 177 32 40 95 102 6-10-9 10 Series C76 Dimensions with Mounting Bracket [First angle projection] Double acting: Single rod Rod foot (Flange), Rod and head

C76

High Speed Actuation Low friction and the standard elastomer cushion seals allow piston speeds up to 1500 mm/s. Either rubber bumper or air cushions are available.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

500 400 300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400

AZ1000

Vespel is a registered trademark of DuPont. 37 Single Stage Regulator for Ultra High Purity High flow Series AZ1300 For UHP gas delivery Flow capacity to 1000 slpm Body material: 316L SS Inlet pressure: Max. 300 psig (2.1 MPa) How to Order Port Number q w e r AZ13 S FV8 FV8 02 2PW Delivery pressure Code Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

Transfer

500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) 30 40 20 20 5 4 3 10 10 5 4 3 ML2B40 ML2B40 2 5 4 3 Moment (Nm) Moment (Nm) Moment (Nm) 2 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B40 ML2B40 2

Series IDG

500/60 600/65 750/80 100/11 200/22 300/35 1000/110 Symbol Drain discharge method 60L, 60S 75L, 75S 100L, 100S 60, 60H 75, 75H 100, 100H 40 75/25 110/40 170/57 240/80 300/100 10, 10H 20, 20H 3, 3H 5, 5H 30, 30H, 30L 50, 50H, 50L 60 S 50/27 150/85 100/54 Nil Manual valve Component equipment C Note 2) N.C. auto drain Note 1) Note 2) Micro mist separator with pre-filter Regulator Contents

Compressed Air Preparation Filter

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2

Refrigerated Air Dryers

R and S (Because S function is also included in R.) S and T (Because S function is also included in T.) The combination of K, L and M is not possible because an auto drain can only be attached to a single option. *2 The maximum operating pressure is 1.6 MPa. *3 Voltage symbol 20 (200 VAC) is the terminal block connection as standard. The Option S cannot be chosen.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage Lead wire length 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Nil 6 10 15 20 25 30 50 G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

SZ3000

Specifications F EX140-SUW1 NKE Corp.: Uni-wire System H EX140-SUH1 NKE Corp.: Uni-wire H System J1 EX140-SSL1 SUNX Corp.: S-LINK System (16 output points) J2 SUNX Corp.: S-LINK System (8 output points) EX140-SSL2 SV SZ SY Type SF NKE Corporation Uni-wire System Type SH NKE Corporation Uni-wire H System Type SJ1/SJ2 SUNX Corporation S-LINK System SYJ SX Courtesy of Steven Engineering, Inc

3 Port Solenoid Valve Series SYJ300/500/700

S Z Without lead wire: (with connector and 2 of sockets only) SY100-30-A Rated voltage R Lead wire length U 5 6 V S R 1 2 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For AC voltage valves there is no S option.

Air Cylinder NCQ7 Series Compact Cylinder

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

MU

M CQS J79W S B 25 10 S M MDU With auto switch CQM CQ2 Built-in magnet Number of auto switches Mounting style RQ Nil S n 2 pcs. 1 pc. n pcs.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.