Clean Air Module

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Red Black Black Polarity indication 20 Series VZ200/400 Precaution 3 Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. How to Wire DIN Terminal Caution Connection 1. Loosen the set screw and pull out the connector from the terminal block of the solenoid. 2.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Electric specifications 0.1 MPa 0.1 MPa Single Double Minimum operating pressure 1 (P) 5 (R1) 3 (R2) 2 position double (metal) 3 position 0.1 MPa (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/ Vibration resistance Enclosure Rated coil voltage 10 to 60C (1) VK None Push type (Tool required) 1 (P) 5 (R1) 3 (R2) VZ 2 position double (rubber) 150/50 m/s2

VZS

: Individual take out of A and B sides K plug connector type: Common take out of A and B sides DIN terminal type: individual take out of A and B sides A little power consumption: 1.8 WDC For serial transmission EVS Fluid Maximum operating pressure Minimum operating pressure Proof pressure Ambient and fluid temperature Lubrication Pilot valve manual override Shock/Vibration resistance (m/s2

AC Servo Motor Driver (Pulse input type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 47 - 5.6.4 Move distance Configuration and Operation

AC Servo Motor Driver (SSCNET Type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -37- 6.6.4 Movement distance Configuration and

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The low profile design saves space and s2 reduces bending moments. b. 52 reuuuEs ucl|ulrg rl|ul|l -. iil _] 'lmproved accuracy with smooth operation J | . . ^ , " ^ Height is approximately 1/3 the size ol an equivalent Series MHZ2.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics Aluminum Body Type Size Port size Orifice diameter [mm] Flow rate characteristics*1 Max. operating pressure differential [MPa] Model Weight*2 [g] C [dm3/(sbar)] b Cv 20 1/8, 1/4 3 1.41 0.54 0.35 0.7 JSX21-Am30m 240 5 1.66 0.54 0.52 0.2 JSX21-Am50m 240 30 1/4, 3/8 4 1.57 0.59 0.52 1.0 JSX31-Am40m 400 7 3.02 0.53 0.88 0.2 JSX31-Am70m 400 *1 The flow rate characteristics

Digital Flow Switches Series PF2A

Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Noise resistance 200 g 240 g Weight Note 3) Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy when combined with PF2A2/3.

Modular F.R.L. Units

600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-A AFD40-A P1=0.5 MPa P1=0.3 MPa 0.04 0.04 P1=0.7 MPa P1=0.3 MPa P1=0.7 MPa P1=0.5 MPa 0.03 0.03 Pressure drop [MPa] Pressure drop [MPa] 0.02 0.02 P1=0.5 MPa P1=0.5 MPa P1=0.3 MPa P1=0.3 MPa P1=0.7 MPa 0.01 0.01 P1=0.7 MPa 0 0 0 0 100 200 300 500 400 600 200 800 1000 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 57 Mist Separator

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

CRB2/CRBU2/CRB1

Static torque calculation Tf = F x L (Nm) Load . g = 9.8m/s2 F: Pressing force (N) : Angular acceleration Load .

Table of Contents

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Movement Load : Angular acceleration F: Pressing force (N) T f = F x l (Nm) . 2 = (rad/s 2) Load Static torque calculation t 2 g = 9.8 m/s2 Ts = F x l (Nm) l : Rotation angle (rad) Lever t : Rotation time (S) Axis Rotary actuator Axis Allowable Load Application of the load on the axial direction is tolerated if no dynamic load is generated and the values are within what is shown in the

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

RSH/RS1H

RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000

smcmaintenancepartslist

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

CE

DATA OUT 1 2 3 SET 1 2 SET MONOSASHI-KUN AC100V OUT1 COM OUT2 COM COM OUT3 Series Guide Series CE1 Bore size (mm) Available stroke range Standard stroke (mm) Series CEP1 Standard stroke (mm) Bore size (mm) 12 equiv. 250 400 500 300 175 200 150 125 100 75 50 100 25 75 50 25 12 25 to 150 20 equiv. 20 25 to 300 32 25 to 400 40 25 to 600 50 25 to 600 63 25 to 600 CEU1 CEU5 Output transistor system

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

Stability of suction position,

ZP3EA-S2 [Weight: 7.6 g] 24 47 15 29 4 20 36 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM Applicable pad part no.