VQ4000

Manual override VQC 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center Nil: Non-locking push type (Tool required) B: Locking type (Tool required) C: Locking type (Manual) (A) 4 (B) 2 (A) 4 (B) 2 VQC 4/5 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQZ 2 2-position double 3-position pressure center (A) 4 (B) 2 (A) 4 (B) 2 Rubber SQ 5 1 (P) 5 (R1) 3 (

VQC4000

(B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specications 2-position double 3-position pressure center (A) 4 (B) 2 Rubber (A) 4 (B) 2 VQ 4/5 Nil Side ported B Bottom ported 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQC 1/2 Manual override 3-position double check (A) 4 (B) 2 Note) 6 VQC 4/5 VQC 4/5 B: Locking type (Tool required) C: Locking type (Manual) Nil:

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

IDX-OM-W017

(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.

XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Modular F.R.L. Unit

AC10A G27-10-R1 G27-10-R1 AD17 Y100 AC30A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 7) AC20A G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 AC40A-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 7) AC40A G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 7) Model Description Round 1.0MPa Note 1) Note 2) Square embedded type Accessories Pressure gauge Note 3) Round 0.2MPa

Speed Controller with One-touch Fitting

2 1/2 4 Fluororesin (TLM, TILM Series) (TH, TIH Series) 1/8 2 R 1/4 3/8 3 NPT 1/2 4 2 1/8 2 2 2 1/4 Gasket seal Uni Brass/Steel wire 1/4 3 3/8 2 1/2 4 1 Without sealant type can be selected as a standard option. 2 Universal type is not available.

AHC System Series MA

1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 0-YNM5 MA3 0-YNM5-R1 MA3 0-YNM5-R2 MA3 0-YNM5-R3 MA3 0-YNM5-R4 MA3 0-YNM5-R5 MA3 0-YNM5-S6 MA3 0-YNM5-R6 MA3 0-AM3 MA3 0-AM5 440 Electrical contact points: 12 10 11 35 14 AHC unit 15 520 20 24 41 25 250 Tool adapter 270 750 AHC System Series MA3 AHC Unit and Tool Adapter/Double Acting Type 1 2 1 2 1 2 AHC Unit/MA3 1-YNM5 (Without robot adapter) AHC

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

IDX-OM-Y002

IDF240D-3-W Parts marked with square brackets are included in the package (900) 1647 (80) 770 1550 10K 100 Flange 10K 100 Compressed air inlet (730) 10K 100 Flange 10K 100 1640 Terminal block Compressed air outlet Power supply port signal connection port (36) R1 Cooling water outlet R1 Cooling water inlet R1 (273) (223) (703) C1/2 R Grommet with membrane (Lower hole 36) (467) Rc 1/2 R1

Manifold Specifications

.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 C8 Embedded type One-touch fitting Applicable tubing O.D.: 8 D-sub connector cable assembly VZS B Both sides Stations Symbol Passage Porting specifications 5(R1), 3(R2) 1(P) Common Common VFS 02 2 stations Symbol Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.

CJ5-S

2 Label protector Cushion seal Urethane PET !

CJ5-S

2 Label protector Cushion seal Urethane PET !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

S Couplers

Thread size Tightening torque (Nm) NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 NPT, R3/4 28 to 30 NPT, R1 36 to 38 NPT, R1 1/4 40 to 42 NPT, R1 1/2 48 to 50 (3) If the product is screwed in with excessive torque, a large amount of sealant will seep out.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Metric size Inch size Body size Port size 06 6 3 1/8 standard 07 1/4 Symbol Cylinder side 08 8 4 1/4 standard 09 5/16 01 R1/8 10 10 11 3/8 5 3/8 standard 02 R1/4 12 12 13 1/2 6 1/2 standard 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series XTO257102 Applicable tubing O.D.