ARM10/11

150 0 20 40 60 80 100 Flow rate /min(ANR) Flow rate /min(ANR) ARM10F-08 ARM10-08 (One-touch fittings: IN/OUT 6) ARM10F-08-1 ARM10-08-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure MPa 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 300 0.00 0 50 100 150 200 Flow rate

OMR0032

LAT3LAT3MLAT3F600 350 700 Min. travel time [ms] Min. travel time [ms] Min. travel time [ms] Load weight1000g Load weight1000g Load weight1000g 300 600 [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

Series VQ Metal Seal/Rubber Seal Body Ported

Name of terminal block (LED) Note POWER RUN SD RD ERR RUN ERR TRD 10 1 24V 0V S1 S2 SG R1 R2 FG SDA SDB SG RDA RDB FG 24V 0V VV5Q14 LED name POWER Details Lighting when power is turned ON Lighting when data transmission with the master station is normal Lighting during data reception Lighting during data transmission Lighting when reception data error occurs.

Vacuum

ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $enie Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

MU

Calculation: (Example) MUL32-100 Basic weight0.42 (Foot style 32 equiv.) Additional weight0.16/50 stroke Stroke 100 stroke 0.42 + 100 / 50 x 0.16 = 0.74 kg CQ2 RQ MU Construction D-X 20Data A A section MU25 Replacement Parts: Seal Kit Component Parts Bore size (mm) Kit no. Contents Description Note No.

180

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa MHZ 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 MHF 100 30 0.4 0.4 80 0.3 MHL 0.3 0.2 20 60 0.2 40 MHR 10 20 MHK 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm)

MHY2/MHW2

Holding point L (mm) 120 80 160 200 20 40 60 Holding point L (mm) 80 0 20 40 60 Holding point L (mm) 80 100 120 MHW2-25D MHW2-40D MHZ2 160 50 Pressure 0.7MPa Pressure 0.7MPa 140 MHZJ2 0.6 0.6 40 120 Holding force (N) Holding force (N) 0.5 0.5 MHQ 100 30 0.4 0.4 80 0.3 MHL2 0.3 20 60 0.2 0.2 40 10 MHR 20 0 20 40 60 Holding point L (mm) 100 80 20 40 60 Holding point L (mm) 80 100 120 140 160

Booster Regulator Series VBA1110 to 4200 1

Accessory (Option) /Part No. 0.2 to 1.0 MPa VEX Model VBA2200 Ambient and fluid temperature 2 to 50C (No freezing) VBA1110-1 VBA4100 VBA2100 VBA4200 Description AMR G27-20-R1 2 pcs. G46-10-01 2 pcs. G27-10-R1-X209 2 pcs. G27-10-R1-X209 2 pcs. G46-10-01 2 pcs.

,

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

5 Port Solenoid Valve, Series VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

,

The test was performed in the axial and right angle directions of the main valve and armature for both energized an de-energized conditions. 1 (P) 5 (R1) 3 (R2) 3-position exhaust center (A) 4 (B) 2 Specific Product Precautions 1 (P) 5 (R1) 3 (R2) 3-position pressure center (A) 4 (B) 2 Caution Internal Wiring Specifications 1 (P) 5 (R1) 3 (R2) M8 Connector: Wiring specifications (EVS1-02)

Speed Controller with Indicator

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

A

NAR1000 NAW1000 K10 1/8NPT 0 ~ 160PSI NAR2000 2500 NAW2000 3000 K12 1/4NPT 0 ~ 160PSI NAR4000 NAW4000 K13 1/4NPT 0 ~ 30PSI NAR4000 NAW4000 K20 1/8NPT 0 ~ 30PSI NAR2000 2500 NAW2000 3000 G27-10-R1 116 Connection D I M E N S I O N S 5K8-10P/4P/2.5P D I M E N S I O N S 4K8-10P/4P/2.5P D I M E N S I O N S G27-10-R1 VACUUM GAUGES H O W T O O R D E R V A C U U M G A U G E S Scale in mmHg

Compact End Lock Cylinder Series CBQ2

Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

CompoBus/D compatible EX140-SDN1 Q 0.1A F, H, J1, J2 Q, R1, R2, V Current consumption (within unit) OMRON Corporation: CompoBus/S (16 points) compatible EX140-SCS1 R1 OMRON Corporation: CompoBus/S (8 points) compatible EX140-SCS2 R2 Mistubishi Electric Corporation: CC-Link compatible EX140-SMJ1 V Type SR1/SR2 OMRON Corporation CompoBus/S compatible Type SV Mitsubishi Electric Corporation

For post-stoppage positioning and locking

Pallet Lock Cylinder W-R1/W-R3 Series How to Order W R1 S2 Type 1 B W R3 S B Type 3 Proximity Switch B With mounting bracket (Without proximity switch) SC With proximity switch * For details, refer to the table below.

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm, Stroke: 100mm, Motor Option: -, Rod End Thread: -, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -