Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: Reverse Mounting Prevention Pin, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 2 Port, N.C., Function: Power-saving Circuit, Voltage: 12VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: CE Compliant

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: P (Reverse Mounting Prevention Pin), Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

Symbol: 07R6 (2 Port, N.C.), Function: Y1 (Power-saving Circuit), Voltage: 6 (12VDC), Wetted Part Material: C (Plate: PEEK; Diaphragm: Kalrez®), Reverse Mounting Prevention Pin: None, Lead Wire Length: 150mm, CE Compliant: Q (CE Compliant)

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ZP

-6 U4 For 4 soft tubing M-5AU-4 U6 For 6 soft tubing M-5AU-6 H Model A B C D 2 E F G H J K Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Note Description SY940 M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm Aluminum die-casted 1 4 3 8 3 8 1 2 SY5000-27-1 (-Q) : SY7000-27-1 (-Q) : SY7000-27-2 (-Q) SY3000-27-1 (-Q) : SY9000-27-1 (-Q) : SY9000-27-2 (-Q) Sub-plate Note) 6 Pilot valve assembly Refer to How to Order Pilot Valve Assembly on page 130.

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Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SYJ7000-22-1(-Q) SYJ7000-22-2(-Q) V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate Note) 7 8 Pilot valve Note) Add suffix -Q for the CE-compliant product.

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