Vacuum System Peripherals:

VDC, 0 to 10 VDC ZH Preset input 4 points 250 or less Current type Input impedance ZU Approx. 6.5 k Voltage type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Approx. 2.7 k Preset input Right angle type cable connector Straight type cable connector ZL 1 to 5 VDC

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

MY1

(mm) 1 in = 25.4 mm MY1B10G Stroke A (with adjusting bolt) 10 5 28 3.3 26.3 35 1.8 5 (Max. 10) 15.4 2.8 SMC MY1B10G Stroke H (with high load shock absorber + stopper bolt) 5 (Max. 10) 1.8 10 5 28 5.5 35 40.8 (Shock absorber stroke) 5 Stroke adjusting unit 15.4 8 Shock absorber (RB0805) 13.5 3.5 2.8 Work piece SMC 29.8 11 Series MY1B Mechanically Jointed Rodless Cylinder Standard Type /

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 !6 !7 !

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

NCA1

EA EE G J JA K R WF Y LF P ZZ TN XT SN d mm 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.10 11/32 9/32 1.43 1 1.71 3 5/8 2.36 6.44 5/8 1 15/16 2 1/4 1.81 M16x1.5 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 1.06 11/32 11/32 1.84 1 1.71 3 5/8 2.40 6.44 7/8 1 15/16 2 1/4 1.81 M16x1.5 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 9/16 5/16-24 3 0 3

VCC

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 !

CNG

For details, refer to page 9-15-66. 9-5-22

MB1

D e D e Effective thread Effective thread 13 13 ZZ + 2 strokes S + Stroke 9 A K f N N f h + Stroke K A l + Stroke 9 l h Without air cushion S ZZ Stroke range Bore size (mm) Effective thread length Width across flats MB J K MM N P V W S ZZ A C B D Ee11 F G H 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 84 84 94 94 114 114 13 14 15.5 16.5 19 19 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25

Free Mount Cylinder

5 5 1 pc. 10 5 10 2 pcs.

CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Model Selection Series CNG Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 100 500 400 300 200 100 0.5 500 400 300 200

IIIIIIIIII

micron Part Number Description F-4103-30F-4103-33F-4103-36F-4103-37F-4103-38F-4103-39F-4103-39NF-4103-40F-4103-50-5 to 5 PSI -5 to 10 PSI -5 to 20 PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH

Environment

Nil Without cable 2 2 5 5 A 10 !

Refrigerated Air Dryer

4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500 75 700 526 (110) 519

CLS

5 !

CY1

SCY1L, #5 (#5 + #7) CY1L40 .

Cylinder with Lock Series CLS

Max. load current or current range (mA) None 5 to 50 5 to 50 5 to 25 5 to 12.5 20 50 25 12.5 30 D-A53 PLC 24VDC 24VDC 100VAC 200VAC 4 to 8VDC 24VAC/DC or less 100VAC 200VAC Max. 24VDC D-A54 Relay, PLC None IC circuit D-A56 None D-A64 Relay, PLC D-A67 None None (2 color indication) IC circuit, PLC D-A59W 5 to 40 24VDC Relay, PLC 5 to 50 5 to 50 5 to 25 5 to 12.5 50 40 20 5 to 40 5

Title not found

n I CONI w thout Input block (So0) D-sub connector kii l25P) wlh 5 onr cable (2-lCylinder port size .5,r Input block Wlthou Sl uniuinput bock (SO0) Flat 'ibbon cable kl (26P1 with r 5m cabe Flal nbbon cable kt (26P) with 3 0m cab e Flai ribbon cable kl {26P1wrth 5 0m cabe Flal ribbon cable k l(20P) withoulcab e roLer) 11lrg Te'mrnal block box krt r16rn,)o, Lead wre kil ',!