Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

EX510-S002A Nil N PNP output (COM.)

VM

N F.O.F. 4-4.5 mounting hole 2.0 mm O.T.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

L3 L2 L1 IN port 2-3/8 (N) N 2.5 E D A F B Q C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 16 V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R 44 16 T 5.5 21 H J H OUT port n-1/4, 1/8 (Pitch) 2 (mm) n (stations) Model Dimension

Floating Joint

0.7 0.8 1 1.25 1.5 2 2.5 2.5 3 24.5 26.5 33 38 51 62.5 80.5 101 129 149 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 112 200 300 500 1300 3100 5000 7900 15300 20 112 200 1100 2500 6000 11000 18000 28000 54000 71000 D-X Technical Data 1155 Floating Joint: Stainless Steel Type JS Series RoHS Specifications Specifications Maximum operating tension and compression force (N)

MU

3 contained in one kit, and can be ordered using the kit number for each cylinder bore size. 2.4-7 Series MUW Basic: MUWB Rod end male thread (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

MXQ

0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25-30 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-50 MXQ25-50 MXQ25-75 MXQ25-75 0.12 0.10 MXQ25-75 MXQ25-75 MXQ25-75 MXQ25-40 MXQ25-40 MXQ25-40 Table displacement amount

energy saving effect

NPT1) Tank drain port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Automatic fluid fill system (Standard) Circulating fluid system Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overflow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Metal Stainless steel, Copper

25

(A cord is attached to the AC adapter.) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 O.D. mm 06 08 10 6 8 10 : With piping on one side : With piping on both sides Made to Order Specifications Contents Symbol Non-standard bar length Symbol for producible bar length: 460 + 60 x n (n: Integer from 1 to 34) (For 2, 3, 6, 11, 14, 19, 24, 31 and 34 for n, use a standard model.)

17

0.1 0.06 1 0.1 0.02 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 1187 Mechanically Jointed Rodless Cylinder Basic Type 25, 32, 40 MY1B Series RoHS How to Order M9BW 25 Z 300 MY1B Basic type Made to Order Refer to page 1189 for details

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F Maximum speed (mm/s) Load center of gravity position l (mm) Maximum speed (mm/s) up to 300 up to 500 up to 700 up to 300 up to 500 up to 100 up to 200 up to 300 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) l: This

Compact Cylinder Series NCQ8

With scraper Mounting Note 4) Through-hole Both ends tapped Rear clevis Front screw clearance hole Rear screw clearance hole Through screw clearance hole B A C E M N Note 4) XB6: Not available with magnet. *For detailed made to order specifications, refer to page 46. Overall length type Number of auto switches Nil Z Standard Super compact Nil S n 2 pcs. 1 pc. n pcs.

Micro Mechanical Valve Series VM1000

N T.T.

e-Rodless Actuator

The tightening torque should be 0.1 to 0.2 Nm. 5 to 6 10 e-Rodless Actuator Series E-MY2H High precision guide type/Nominal size: 16, 25 How to Order High precision guide type E-MY2H 16 N 100 TA M9B Nominal size Number of auto switches 16 25 Nil S n 2 pcs. 1 pc. n Stroke Refer to the standard stroke table.

MLGP

2 pcs. 1 pc. n pcs.

MLGP

2 pcs. 1 pc. n pcs.

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

ML2B

CX 100 10 20 30 4050 100 200 300 Thrust energy E2 400 500 Fs Fs + mgs Fsmgs CY W2 max W1 max W3 max Absorbed energy E E1 + E2 MQQ M Caution Allowable load (N) Symbol : Speed of impact object (m/s) F : Cylinder thrust (N) s : Shock absorber stroke (m) ML2B32 Horizontal collision: P = 0.5 MPa 1.

MXS Series Air Slide Table

100 0.04 0.030 0.05 MXS2575 MXS2575 Table deflection mm Table deflection mm Table deflection mm 0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250 300 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 50 Air Slide Table

MXS

deflection (mm) Table deflection (mm) 0.05 MXS2575 MXS2575 MGQ MXS2540 MXS2550 0.025 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 MGG 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 MGC 0.01 0.01 0.005 MGF 0 100 200 300 400 0 100 200 300 400 0 50 100 150 200 250 300 Load (N) Load (N) Load (N) CY1 MY1 3.11-9 Series MXS How to Select Selection Flow Chart Formula and Data Selection