Sine Cylinder Series REC I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2
I-020B I-032B I-040B 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 18 41 M8 x 1.25 14 10 11 66 46 16 20 36 M8 x 1.25 10 14 0.058 0 0.1 0.2 0.058 0 0.1 0.2 9 9 9 9 22 45 14 10 14 69 48 18 20 38 10 14 M10 x 1.25 M10 x 1.25 0.070 0 0.1 0.3 0.070 0 0.1 0.3 12 16 12 16 24 50 20 14 13 92 69 22 24 55 20 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting Y (Max.) hole H10 Shaft (mm) H L MM ND NX2
VQ550 Indicator light Indicator light 214 121.8 195 (200.5) 91.5 59.5 105.8 (Port A) 17.5 13.5 (Port B ) 2 2 73 (78.5) 122 106 59.5 (Port A) 17.5 13.5 (Port B) 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 66 40 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole G1/2 Electrical entry 18 31.5 37 41 50 98 G1/2 Electrical
47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 15 31 30 to 1000 18.5 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 17 36 35 to 1200 Bore size (mm) M N P Q R R1 S T TDe8 TT TY TZ V VA H Z ZZ TX MA MM 125 140 160 32 M12 x 1.75 M30 x 1.5 19 35 1/2 25 303 50 170 164
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.
63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20
Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80
M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80
, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25
Weight is reduced by up to 14 %. Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.
11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12
11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12
P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 10-4-7 8 Series CQ2Y Dimensions/63 to
26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5
Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension
8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5
Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.
Controller version (the time in the bracket indicates the schedule for switching) Function Ver 2.0 Ver2.1 to Ver2.4 Ver2.5 (August 2014) (Sept. 2015) (June 2020) Corresponding card motor 6 types LAT3M-50 LAT3M-50 LAT3F-50 LAT3F-50 Alarm history count 4 points 4 points 20 points Communication speed 19200bps 2,400bps 2,400bps 9,600bps 9,600bps 19,200bps 19,200bps 38,400bps 38,400bps 57,600bps