Electric Actuator with Integrated Guide Series LTF

to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K to 1000 to 890 to 710 to 580 to 480 64 32 LTF8FNL-K to 890 to 710 to 580 to 480 to 1000 71 50 18 LTF6EPF-K to 300 to 230 54 22 LTF6ENF-K to 300 to 230 58 26 LTF8FPH-K to 500 to 440 to 350 to 290 to 240 62 30 LTF8FNH-K to 500 to 440 to 350 to 290 to 240

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

CXT

D-F7BAL D-F79F D-F7LF D-F7NTL D-F79 D-F7P D-J79 D-F79W D-F7PW D-A72H D-A73H D-A76H D-A80H 32, 40 (mm) D-A72H D-A73H D-A76H D-F79W D-F7PW D-J79W D-F7NTL D-F7BAL D-F79F D-F7LF D-A80H D-F79 D-F7P D-J79 Auto switch model A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke 32 40 9.5 13.5 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 10.5 13 32.5 36 6.5 9 32.5 36 13.5 17.5 Bore size (mm) Long

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

(V), D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

Sine Rodless Cylinder Series REBR Direct Mount Type

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Cylinder with Lock Series MNB

Series Variations Applicable auto switch models Standard variations Lock system Standard stroke (mm) Bore size (mm) Solid state switch Reed switch Type Model Action Series Built-in auto switch magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Symbol Nil R S RS Specifications Internal pilot specification External pilot specification Internal pilot specification/Built-in silencer External pilot specification/Built-in silencer Mounting position Symbol Applicable stations B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U D side U side Both sides M Special specifications Indicate special specifications separately on a manifold

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

exhaust center 3 position pressure center 2 3 4 5 5 24VDC Rated voltage 2 1 Station U side D side Pilot type 24VDC -COM SMC Nil R Internal pilot External pilot SS5X3-45GD-05U-C6 .1 set (manifold part number) SX3140-5LOZ ... 3 sets (single solenoid part number) SX3240-5LOZ ... 2 sets (double solenoid part number) The "" symbol indicates mounting.

XL-OMV0002

Kalrez R Chemraz R VMQ PLASMA ARMOR R No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro R Kalrez R dupont dupont Chemraz R Greene Tweed & Co ULTIC ARMOR R Nippon Valqua Industries, Ltd. 6 XL-OMV0002 3. 3-1.

CL

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

R.

Series 12-REA Sine rodless cylinder

1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

LMU100/200 Series Mist Spray Unit

1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

1

The signal has to be converted by an A/D converter for pressure display or switch output. Current output signal is a current signal in the range of 4 to 20 [mA]. The signal is transformed into a voltage signal before being converted by a A/D converter for pressure display or switch output.

Siiiil"Tivrc

\ i n r t l l i r r ' t t l o n l qsilrrc NEW PRODUCT GUIDE Sil"Tivrc ,rt{ ll,( '!\'orlJ \ l.tf!

V

R E SY3/5/7000 SS5Y 20 T H R E A D T Y P E PT 00T NPTF M A N I F O L D S E R I E S V A LV E S TAT I O N S 3 SY3000 5 SY5000 7 SY7000 02 2 Stations to 20 20 Stations H O W T O O R D E R B O D Y P O R T E D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SY 20 B R A C K E T S E R I E S Without Bracket F1 With Foot Bracket F2 With Side Bracket 3 SY3000 5 SY5000 7 SY7000 A, B P O R T S I Z

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Hydraulic

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-A79W D-F7NTL D-F7F D-F9BAL Bore size (mm) A B A A A A B A A A B B B B B B 20.5 11.5 21 18 25 26 12 9 16 17 20 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5 32

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.