ZX

Voltage Vacuum switch unit/Filter unit 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC E PS PB F Vacuum switch (For general purpose) With suction filter Adsorption confirmation switch Nozzle dia. (0.3 to 0.7) Nozzle dia. (0.5 to 1.2) Only suction filter Caution Vacuum digital pressure switch unit D 21 22 23 24 DP 2 outputs/without analog output 2 outputs/

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 59 Series C96 Dimensions Bore size Stroke Basic: C96S(D)B SW PL 2 x EE PL KK WA B D B R E WB Cushion valve 8 x RT VD L9 BG L2 L12 A WH G H G L8 + Stroke VA ZZ + Stroke R E With rod boot e d f l h h + L8 + VA + Stroke Stroke range (mm) A B d11 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E R Bore size (mm) Without rod boot With rod

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

air-filter-e

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

Air Preparation Equipment

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

CL

only No. q w e r t y u i o !

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: VBA VBAT VBA VBAT 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 AP100 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 1017 VBA Series Construction/Replacement Parts VBA10A VBA11A w q r e w t r e u q t VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q w r y q t e VBA22A, 42A

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

Power Valve: Economy Valve Series VEX5

N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

MVGQ

2 Piston rod e Carbon steel Urethane Hard chrome plated Bumper B 32 to 100 !3 Aluminum bearing alloy 12 to 40 Magnetic material White anodized Magnet !4 Collar r Aluminum alloy 50 to 100 Painted Lead-bronze casted Slide Bearing !5 Bushing Lead-bronze casted Felt Felt !6 t 12 to 63 Colorless chromated Resin Holder !7 Aluminum alloy Head cover y 80 to 100 Painted Ball bushing !