Electric Actuator / Slider Type 《 AC Servo Motor 》

Slider type LEFS series 2.1 Specification LEFS25,32,40 AC servo motor (100W / 200W/400W/) Model LEFS25 LEFS32 LEFS40 Stroke [mm] Note 1) 50800 501000 1501200 Work load [kg] Note 2) Work load [kg] 10 20 20 30 40 45 30 50 60 Vertical 4 8 15 5 10 20 7 15 30 400 1500 900 450 1500 1000 500 1500 1000 500 401 500 1200 720 360 1500 1000 500 1500 1000 500 501 600 900 540 270 1200 800 400 1500 1000

CQS

(N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

VZ100/300/500

(Locking type is for VZ300/500 only.) Coil DC V100 Non-locking push type must be pressed in the direction of the arrow.

IR1000/2000/3000

5 OUT side passage IN q IN q w y Bleed Bleed !1 !3 !2 e w r Exhaust SUP(1) OUT(2) SUP(1) OUT(2) u !0 !2 !0 t Valve guide Valve guide Replacement Parts IR100 IR200 IR300 IR2120 IR3120 Part no. No.

2/3 Port Valve

Refer to Table w to select the port size of the screw-in styles (6A to 50A) and flanges (32F to 50F).

25

Static Neutralization Characteristics e Potential Amplitude IZS40, 41 Supply pressure: 0.3 MPa With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 2000 2000 1750 1750 Potential amplitude (V) Potential amplitude (V) 1500 1500 1250 1250 1000 1000 1 Hz 1 Hz 30 Hz 750 750 30 Hz 500 500 250 250 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance

VP300/500/700

DC EZ, TZ, DZ, YZ (100 VDC or more) EZ, TZ, DZ, YZ (100 VDC or more) Z EZ, TZ, DZ, YZ (24 VDC or less) Note) W/ surge voltage suppressor is available only for grommet type. 4-8-3 4 Series VP300/500/700 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1.

AC Servo Motor Driver (CC-Link Type)

motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Compact Cylinder

(mm) D-A9 D-M9 D-F9 W D-F9BAL Auto switch model Symbol A B W A B W A B W Hs 22 24 27 30 36 41 20 25 32 40 50 63 15.5 15.5 19 20 13.5 15.5 8.5 10.5 12 12 18.5 20.5 11.5 11.5 15 16 9.5 11.5 5.5 7.5 9 9 15.5 17.5 3.5(1) 14.5 14.5 18 19 12.5 14.5 9.5 11.5 13 13 19.5 21.5 -9.5 -7.5 -6 -6 0.5 2.5 -0.5 1.5 3 3 9.5 11.5 5.5(3) Bore size (mm) 7 (4.5) 7 (4.5) 13.5(11.5) 15.5(13.5) The dimension inside

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

HRX-OM-S004

Max. 2s 2s 1s 1s Min. 0.5s 0.5s 0.2s 0.2s 0.1s 0.1s 0.05s 0.05s 0.02s 0.02s 0.01s 0.01s 6000 100 125 200 300 400 500 700 1000 1500 2000 30004000 10 100 125 200 300 400 500 600700 1000 1500 2000 3000 4000 600 5000 7000 Current (% for breaker capacity) Current (% for breaker capacity) For HRS100-A/W-20-B For HRS150-A/W-20-B HRS100-A/W-40, HRS150-A/W-40 4h 2h 1h 30min 20min 14min 10min 6min

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

Series PF2W Digital Flow Switch For Water

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Table of Contents

No. q w e r t y u i o !

Wireless System

(For details a p. 22) Country Standard Japan (Japanese radio law) Wireless slave unit Wireless master unit EU (CE marking/RE Directive) CAT.E02-28A EX600-W Series USA (FCC) Wireless System EX600-W Series Provide safe and reliable communication Uses the 2.4 GHz ISM frequency band kHz MHz GHz 10 10 10 1 1 100 100 Wireless System Wireless LAN Wireless devices RFID Bluetooth AC/DC welding machine

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

Heavy Duty Stopper Cylinder

Work W Work W Work W Work W Bracket Cylinder goes up Cylinder goes down Lever basic position Lever locked Lock released With cancel cap With lever detection switch RSQ When the lever stands erect (when the energy is absorbed), the switch turns on a signal that determines the pallet has reached the stop position. (For details of lever detection switch, refer to page 595.)

MXW

Load Weight W 20 Maximum Load Weight MXW25 17 (kg) W 15 Maximum load weight (kg) 12 MXW20 W Model 10 MXW16 MXW8 1.8 7 6 MXW12 4 5 4 MXW12 MXW16 7 3 2.5 MXW20 11 2 MXW8 1.7 MXW25 17 1.5 W W 1.2 Note) No need to consider this load factor in the case of using perpendicularly in a vertical position. 1 50 100 200 300 500 Piston speed (mm/s) Graph (1) Mp/Mep (Pitch moment) My/Mey (Yaw moment) Mr