Magnet: Built-in, Mounting: MF1, Front Flange, Bore Size: 1 1/2", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: None, Mounting: MP4, Single Detachable Rear Clevis, Bore Size: 2 1/2", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MF1, Front Flange, Bore Size: 2", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MT1, Rod Trunnion, Bore Size: 3 1/4", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: None, Mounting: MP2, Detachable Rear Clevis, Bore Size: 2", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MP4, Single Detachable Rear Clevis, Bore Size: 2", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: Built-in, Mounting: MT1, Rod Trunnion, Bore Size: 2", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: None, Mounting: MP4, Single Detachable Rear Clevis, Bore Size: 4", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

Magnet: None, Mounting: MF1, Front Flange, Bore Size: 3 1/4", Stroke: 16", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

MY1

) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 m MY1MW40 MY1MW40 (1300) (1300) (1300) 60 60 (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1CW32 MY1CW32 MY1CW32 (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000

Thermo-con/Rack Mount Type

glycol 20% 1800 1800 1600 1600 Ambient temperature 35C 1400 1400 Heating capacity [W] Heating capacity [W] 1200 1200 1000 1000 Ambient temperature 25C 800 800 Ambient temperature 15C 600 600 400 400 Ambient temperature 25C 200 200 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 9 Thermo-con/Rack Mount Type Air-cooled HECR

Slider Type Ball Screw Drive/11-LEFS Series

LEF LEF Lead 6: LEFS25B Lead 6: LEFS25B Lead 12: LEFS25A 25 15 Work load [kg] Work load [kg] Lead 12: LEFS25A 20 Lead 20: LEFS25H LEJ Lead 20: LEFS25H 15 10 A LEL A 10 5 5 LEM 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 LEY Speed [mm/s] Speed [mm/s] LEFS32/Ball Screw Drive LES Horizontal Vertical LEPY LEPS 60 30 Lead 8: LEFS32B Lead 16: LEFS32A Lead 8:

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

) (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1CW50 m MY1MW40 MY1MW40 (1300) (1300) (1300) 60 60 (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1CW32 MY1CW32 MY1CW32 (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 l l MY1CW25 MY1CW25 30 30 (1000) (1000) (1000) MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000

Ionizer Series IZS40/41/42

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

A Work load [kg] Work load [kg] LEJ LEJ 40 Lead 20: LEJS63A Lead 16: LEJS40A Lead 30: LEJS63H 30 Lead 24: LEJS40H LEL A 20 A LEM 10 A A 0 LEY 0 200 400 600 800 1000 1200 1400 1600 1800 0 200 400 600 800 1000 1200 1400 1600 1800 Speed [mm/s] Speed [mm/s] LES Vertical Vertical LEPY LEPS 10 20 Lead 10: LEJS63B Lead 8: LEJS40B A Area where the regeneration option is required.

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

15

0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Stroke [mm] [Graph 7] Allowable load mass by stroke 40 100 y, z + A = 0 y, z + A = 50 Load mass [kg] y, z + A = 100 y, z + A = 200 10 y, z + A = 300 1 0 200 400 600 800 1000 1200 1400 1600 If load center of gravity exceeds the value of y, z + A on the graph, please consult SMC.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

Table of Contents

IDG100H (Type A products group) P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to pages 14-19-28 to

IDG

IDG100H (Type A products group) P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 30 40 50 0 400 800 1200 1600 Outlet air flow rate (l/min (ANR)) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to pages 14-19-28 to