Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 3", Port Location: Perpendicular, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 3", Port Location: In-line, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 4", Port Location: In-line, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 5", Port Location: Perpendicular, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 6", Port Location: Perpendicular, Auto Switch: Band Mounting, Number: -

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 2", Port Location: In-line, Auto Switch: Band Mounting, Number: -

Booster Regulator/Air Tank

VY1 Connected to VBA20A, 40A VBAT20A1 VBA VBAT VBA VBAT Material: Carbon steel Connected to VBA22A, 42A AP100 Tank IN port Rc 1/2 Booster regulator IN port Booster regulator IN port Tank OUT port Rc 1/2 C C Spare port Rc 1/2 EXH: C EXH: C (A) (B) (A) D (B) OUT OUT 305 180 206 206 4 x 13 4 x 13 50 50 200 100 100 400 Drain port Rc 1/4 200 674 (mm) D Note) 469 493 685 A 481 520 444 477 B 394

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 38 55 MXY8 2.5 CX

Series AP500

(66.5) 40 0.28 20 0.14 0 0.00 0.69 (17.5) 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) A AP1200FC Inlet pressure:150 psig (1.0 MPa) 3/4 inch connections ) B 80 0.55 2 x 10-32 UNF depth 0.3 (7.6) (Mounting hole) 0.88 (22.4) 70 0.48 Connections A B Delivery pressure (MPa) Delivery pressure (psig) inch (mm) inch (mm) 60 0.41 3.70 4.00 3.46 (94.0) (101.6) (87.9) FV4 MV4 TW4

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61 67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B A B 71.6 79.6 95 118 142 164 202 80 14.8 8.5 14 9 A B 55 MY-S40 M10 x 1.5 A

SQ1000/2000

B SOL. B SOL. B SOL.

SYJ3000/5000/7000

port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5

0.4

(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B A B 71.6 79.6 95 118 142 164 202 80 14.8 8.5 14 9 A B 55 MY-S40 M10 x 1.5 A B 100 18.3 10.5 17.5 11.5 70 M12 x 1.75 MY-S63 Guide for Side Support Application For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight.

VQ7-6/7-8

SMC SMC SMC 23 20 B A VZ 9 PA A B VF B A VFR PA A B VP4 L1 L2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position)

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

5 Port Solenoid Valve SY Series

4/25/3 (A/BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23

AC Servo Motor Driver (CC-Link Type)

C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Point table No.1 Initial value Recommended value Home position return acceleration time constant (msec) *5 0 600 300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.