High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Manifold Regulator Modular Type ARM2500/3000 Series

Accessory (Pressure gauge) Body size None (With plug) Nil G1 G2 2500 3000 Back side thread: G33-1001 Vertical side thread: GA33-1001 Pressure gauges are shipped together (but not assembled).

HRX-OM-X071

Ambient temp. 7000 6000 25 25 6000 32 32 Cooling capacity[W] Cooling capacity[W] 5000 5000 40 40 4000 4000 3000 3000 2000 2000 1000 1000 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig 9-7 Cooling capacity (HRR050-A-20-) 9.4.2 HRR050-W-207000 7000 Facility water temp. 6000 6000 25 Cooling capacity[W] Cooling capacity[W] 5000 32

Electric Actuator / Slider Type 《 AC Servo Motor 》

PA06 1 262144 (Position control mode) 2000 1200 600 2400 1600 800 3000 2000 1000 Electronic gear denominator *3.

VZS

VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 3-7-5 6 Series VZS2000/3000 Caution 7. Part number for Screws and Gasket Assembly Precautions on ordering The interface gasket configuration between valve manifolds has been changed in line with the configuration changes of the valve interface.

High Power Cylinder Series RHC

9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 40 8 10 1/4, 3/8 500 6 40 =0.7 30 40 1000 1500 2000 2500 3000

LEC-OM02904

PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB19 VRF1 50 Hz PB20 VRF2 50 Hz PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 ( ) PB28 CDT 100 ms PB33 VRF1B 60 Hz PB34 VRF2B 60 Hz (b) OFF OFF ON 63.4 CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000 20 50 20 50 60 50

ZSE2/ISE2

ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12

C76

angle projection] (Band mounting type) (Rail Mounting type) D-C7 D-C80 D-A7 D-A80 ( ): In case of D-A72 D-A7H D-A80H D-C73C D-C80C D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A73

Pin Clamp Cylinders

/Mounting Method Applicable cylinder -X2321/-X2322 -X2321/-X2322 -X2321/-X2322 Applicable auto switches D-P3DWAl D-M9lV/M9lWV D-A73/A79W Bore size [mm] 32 32 32 Auto switch mounting bracket part no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Auto switch D-A73 CRB2 CRBU2 CRB1 23 (Perpendicular electrical entry) 8-M5 x 0.8 depth 6 (Opposite side 4 locations) MSU CRJ CRA1 Port size CRQ2 MSQ MRQ A port B port D20Foot style: CDRA1LW30 Mounting hole Auto switch D-A73 A port B port ( ) are the dimensions for rotation of 180.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

D-A73 A port B port ( ) are the dimensions for rotation of 180.

C76

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A73

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

D-J51: 5ms or less MHZ2 Lead Wire Length MHZJ2 How to specify lead wire length MHQ (Example) MHL2 L D-A73 MHR Lead wire length 0.5m 3m L 5m Z N MHK MHS None Applicable to only connector type switch D-C MHC2 Note 1) Lead wire length Z: 5m Applicable to Reed switch: D-B53/B54, D-C73 (C)/C80C, D-A73 (C) (H)/A80C MHT2 Solid state switch: Made to order (Except D-F9, F9lV, F7lWV) D-A53/A54, D-Z73

Magnetically coupled cylinders save space and have a wide range of applications. The NCY series can be used in many diverse environments, because there is no external leakage. The use of a linear guide makes loading and moments, directly on the cylinder possible. T-Slots on the mounting surfaces provides mounting freedom, and a variety of guides can be used to achieve the necessary accuracy

33

Model HRSE012-A-10-(T) HRSE018-A-10-(T) Cooling method Air-cooled refrigeration Refrigerant R407C (HFC) Refrigerant charge kg 0.3 0.32 Control method Compressor ON/OFF Ambient temperature/Humidity/Altitude Note 1), 11) Temperature: 5 to 35C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating fluid Note 2) Tap water, 15% ethylene glycol aqueous solution Set temperature range Note

energy saving effect

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 Handling Warning Thoroughly read the Operation Manual.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

5 Port Solenoid Valve Series 10-SV1000/2000/3000/4000 Serial wiring P.182 Decentralized serial wiring Cassette base manifold 10-SV1000/10-SV2000 Tie-rod base manifold 10-SV1000/10-SV2000/10-SV3000/10-SV4000 Number of outputs: 16 EX500 gateway communication specifications DeviceNet, PROFIBUS-DP, EtherNet/IP IP67 compliant Applicable series Serial wiring with input/output unit P.192 Applicable