For post-stoppage positioning and locking

Clamping Force Specifications W-R1-S2Type Type 1 Type 3 Mass of transferred object 1000 kg or less 3000 kg or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure

High Vacuum Angle Valve

(5000) Heat-resistant heavy-duty cord 3.4 40 Most sensitive position 7 3.4 3000 20 XL Series Specific Product Precautions 1 Be sure to read this before handling the products.

Aluminum High Vacuum Angle Valve

L type: Lead wire length 3000 mm 3 Flange: Seal material changed part Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

High Power Cylinder:

RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5

CE

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

4000 0 1000 2000 3000 (mm) (mm) 4000 Support spacing (l) Support spacing (l) 8-12-22 Proper Auto Switch Mounting Position (Detection at stroke end) Note) The operating range is a guide including hysteresis, but is not guaranteed.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Thermo-chiller

In locations at an altitude of 3000 m or higher (Except during storage and transportation) * For altitudes of 1000 m or higher Because of lower air density, the heat radiation efficiencies of the devices in the product will be lower in the location at an altitude of 1000 m or higher.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If equipped with a light, be careful not to damage the light with the cords lead wires. 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC 10-SY3120-5LO-M5 SY100-30-4A-20 For AC 10-SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.

Intrinsically Safe Valve

/N.C.) 1500 mm 4(A) 2(B) 2000 mm A Note 2) 3000 mm 10 mm Semi-standard 5(EA) 3(EB) 1(P) Electrical entry 4-position dual 3 port valves (N.O./N.O.) 2(B) 4(A) Symbol Electrical entry B Note 2) L-type plug connector Pilot type Nil R L Internal pilot 5(EA) 3(EB) 1(P) 4-position dual 3 port valves (N.C./N.O.)

Compressed Air Preparation Filter

] Air flow rate [L/min (ANR)] AFF50 AFF60 6 20 Inlet pressure 0.3 MPa Inlet pressure 0.3 MPa 5 15 Inlet pressure 0.5 MPa Inlet pressure 0.5MPa 4 Pressure drop [kPa] Pressure drop [kPa] Max. flow capacity line 3 10 Max. flow capacity line Accessories Sold Separately/ International Standard 2 5 1 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 500 0 500 2000 1500 1000 2000 2500 1500 1000 3000

Series AP3500

Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)

Quick Exhaust Valve Series AQ

Description AQ2000/3000/5000 AQ1500 AQ1510 Aluminum die-casted Zinc die-casted Zinc die-casted Body q Brass Brass Guide w Cover Aluminum die-casted e Replacement Parts Part no. Material No.

PF3A7xxH.eng

(Press the and buttons simultaneously for 1 second or longer) [ P] Select input switch operation [3000] 3000 L/min (PF3A706H) Accumulated flow error Sub display In measurement mode, the display of the sub display can be temporarily changed by pressing the or buttons. [6000] 6000 L/min (PF3A712H) [F 1] Installation Direct mounting Install the product with 4 screws suitable for the product

PF3A7xxH-L.eng

[P_1 ] Select input switch operation [3000] 3000 L/min (PF3A706H) Do not use the product for flammable fluid. Fire or explosion can result. Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range.

HRX-OM-M090

Fig 9.4-4 Cooling capacity(HRS018--20) 9.4.5 HRS024--20-(BJMT) 3500 3500 Ambient Ambient 3000 3000 temperature temperature or or Cooling capacity[W] Cooling capacity[W] 2500 2500 facility water facility water temperature temperature 2000 2000 25 32 40 25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[]

Secondary Batteries

IR1000 to 3000 Precision Regulator This is not completely copper-free since the electric circuit is included. (Wetted parts are copper-free.) ITV1000 to 3000 Electro-Pneumatic Regulator CB-97XH Compatible with standard models Residual Pressure Indicator *Please contact SMC for pressure gauges.