Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

HRX-OM-X084

2 2 Blue 1B 4 1 PT2 2B Blue 7 External temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 02 2 stations N SD Note 2) SU Note 2) 11 11 stations W Note 1) Add 1 station for terminal block box mounting.

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

CQS

2 3.2 3.2 17 19 24 26 2.8 2.8 4 4 4.5 4.5 6.6 6.6 24 25.5 28.5 32.5 13.5 13.5 14.5 15 CDQSL Bore size SCQS Bore size , #2 (#2+#11+#13) (All dimensions are common between standard stroke and long stroke except "A" and "B".)

Cylinder with Lock Series CNG

l 0.25 ZZ H e f h ZZ 20 25 32 40 21.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 1/8 2 65 141 (149) 11 3 12 35 30 16 55 198 (206) 11 178 (186) 26.5 M6 x 0.75 5.5 8 M10 x 1.25 29 1/8 2.5 73 151 (159) 11 3 12 40 30 17 62 215 (223) M5 x 0.8 depth 7.5 11 193 (201) Stroke x 26.5 M8 x 1.0 5.5 10 M10 x 1.25 35.5 1/8 2.5 73 154 (162) 11 3 12 40 35 17 62 218 (226) M5 x 0.8 depth 8 10 (11) 196 (204

Profile Design ISO/VDMA Air Cylinder Series CP95

45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5

VZ100/300/500

Weight (g) Port size Body ported VZ110 VZ120 70 M5 x 0.8 0 to 0.5 Note ) Weight stands for grommet type Flow Characteristics Flow characteristics Type of actuation Port size N.C.: 1 2 (P A) N.O.: 3 2 (R A) N.C.: 2 3 (A R) N.O.: 2 1(A P) Supply side Exhaust side Model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Body ported VZ110 VZ120 N.C. 0.11 0.19 0.026 0.071 0.023 0.042 0.19 0.13 0.071

IDX-OM-W011

. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Thermo-chiller/Rack Mount Type

Density r: 1 [kg/dm3] (or, using conventional units, weight volume ratio c = 1 [kgf/L]) Specific heat C: 4.19 x 103 [J/(kgK)] (or, using conventional units, 1 x 103 [cal/(kgfC)]) 2. Values for density and specific heat change slightly according to temperature shown below. Use this as a reference.

SZ3000

11 11 23 11 23 SOL.A SOL.B SOL.B Light/Surge voltage suppressor Station 10 Station 10 SY SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor SYJ 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor SX Light/Surge voltage suppressor Light/Surge voltage suppressor Courtesy of Steven Engineering, Inc.-230 Ryan

ZP3

across flats 10 2 2 C Model A B C Vacuum inlet direction q Pad dia.

LEY-OM007

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

ZPT/ZPX

0.8 11 H G F E Y 4 40 C A B D Dimensions (mm) A B C D E G H I Y F Model ZPX100HB-B01-B10 M10 x 1.5 100 103.1 68.6 106.7 47.5 75.5 97.5 35.5 60.5 -B12 M12 x 1.75 ZPX125HB-B01-B10 M10 x 1.5 125 128.5 88.6 135 56 84 106 44 69 -B12 M12 x 1.75 13-11-92 11 Vacuum Pad: Large Size Bellows Type Lateral Vacuum Entry With Buffer Series ZPX Specifications ZX Lateral Vacuum entry direction Buffer type

Thermo-chiller

Specifications Model HRLE090-A-40 Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 2 Control method PID control Ambient temperature C 2 to 45 Circulating fluid*1 Tap water, Deionized (pure) water Set temperature range C CH1: 15 to 25, CH2: CH1 + 0 to 15 Cooling capacity (CH1, 2 total) 50/60 Hz*2,*11 kW 8.0/9.5 Heating capacity (CH1, 2 total) 50/60 Hz*3

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.