Speed Controller with Indicator

Note 1) Body size With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 Control type Note) 0 Meter-out 1 Meter-in Indicator window direction Note) Meter-out and meter-in types can be visually identified by color of the knob.

Pin Clamp Cylinder Series CKQ/CLKQ

(H) (L) (L) (H) 17 85 (Same measurement on 2 sides) (Same measurement on 2 sides) 3 LOCK 40 600.05 (t=1 x 1, t=0.5 x 2) Depth 15 4 x M10 x 1.5 2 sides x (Same measurement on 2 sides) 40 (when the shims are attached) 40 2 sides x 40 (M10) 400.05 (8) 2 x 8H7 Depth 13 (Same measurement on 2 sides) With shims 47 13 91 P1 (lock release port) (The lock is released when pressure is applied.) 32

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

NCA1

/8-16 1 1/4 1 1 15/16 1.75 3 3/4 2 3/8 4 7/8 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 0 3 1 1/2 3/8 19/32 1.3 1.06 2.48 2.19 325 (3.25") 1 3/4-16 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2 5/8 5 53/64 1 1/8 3.9 1 1/2 1 1/2 1/2 7/8 3/8-24 3 3/4 1 7/8 0 1/2 1.57 1.18 5/8 2.72 2.76 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1 1/2 1/2 7/8 3/8-24 4 1/2 2 1/4 0 1/2 1.57 1.18 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34

NCA1

(3.25") 1 3/4-16 1/2-13 1 1/2 1 3/8 2 7/16 2.34 4 1/4 2 5/8 5 53/64 0 1 7/8 3 3/4 3/8-24 7/8 1/2 1 1/2 1 1/2 3.9 5/8 1 1/8 1.18 1.57 1/2 2.76 2.72 400 (4") 1 3/4-16 2 1/4 4 1/2 3/8-24 7/8 1/2 1 1/2 1 1/2 4.7 1 1/8 1.18 1.57 1/2 0 3.32 2 5/8 5 53/64 2.72 5/8 1/2-13 2 1/16 1 3/8 2 7/16 2.34 4 1/4 Double Detachable Head Side Clevis Style: NCA1D (MP2 mounting style) 4-DD P + Stroke F Y 2-EE

energy saving effect

Cooling Capacity HRSH100-A-20/40HRSH100-W-20/4014 16 Ambient temperature 32C Facility water temperature 32C 14 12 Cooling capacity [kW] Cooling capacity [kW] 10.5 10 11.5 12 10 Ambient temperature 43C 8 8 Facility water temperature 40C 6 6 Ambient temperature 45C 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH150

MLU

2-DR CZ 2-CR DH CH DI CI DE DF CE CF DL CL DA DB CA CB CDH10 (mm) DDH10 (mm) CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Micro Mechanical Valve Series VM1000

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

IDX-OM-W014

-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 2 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i

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Wh'rl 1pc 4) 85 + 30{n 2 4l 10+30(2 2) 75+~24 80+30(11 2 With n pes , . f-f-("::--=-=2.c..; 4 ::-.6 8 '-c---4.,, 8 e.'-,-~.-,-,-'~')c-t-_-"_ _ c..;.-= 8. 12. ' 6 .. )_+_"",":.:=:.: 4 ,,-.",8." "L __--+_-" "'.-= .. ,L)_+--, (" =-,12 '6 (" =4 ',,,2'-.. , ,,,6 ::" ) _~ Wlth2pcs (DiHe!'

New

For Air/ D Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2

JXCx-OMT0005CN

0V Ry U Ry LK RLS6 Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V4 DC24V 0V LK RLS6 Ry (2 ) (3)EMG (2)M 24V (1)C 24V 0V4 DC24V 0V LK RLS(6) Ry 3 (3)EMG (2)M 24V (1)C 24V 0V(4) DC24V 0V OFF 28 - 32 DC24V M24V EMG () 0V DC24V Ry (1 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (2 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4 DC24V 0V (3 ) (3)EMG LK RLS6 Ry (1)C 24V (2)M 24V 0V4

Applicable Auto Switch Model

D-E8lA 2 wire 3 wire D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color 3 wire 7 37 D-F9l 2 2 wire 7 32 color 3 wire 7 34 D-F9BA 37 5.3-75

ML2B

2-G F E 2-H C D A B Side support B MY-SB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

ML2B

2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

4/5 Port Air Operated Valve Series SYJA3000

Pilot pressure range 0.4 0.3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure range MPa 5-2-26 Series SYJA7000 4/5 Port Air Operated Valve Flow Characteristics/Weight Flow characteristics Note 2) Note 3) Weight (g) Pilot port size Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2