Valve Single Unit

Triangle mark A COM B + A COM B + A COM B + A COM B + A COM B + Manual override (Press and turn for the locking type.) (1) Stations (n) (2) (Light/Surge voltage suppressor) 75.3 67.7 58.2 60 37.8 26 Connector polarity indication 28.5 8.8 Applicable connector: 26 pins MIL with strain relief (Conforming to MIL-C-83503) SS5X7-20N Connector polarity indication n: Stations (n1 + n2) Stations n

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

KP/KPQ/KPG

EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas 15-5-6 Low particulate generation KP Resin: PP Metal: Stainless steel 304 Completely oil

IZSE_X101

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Pilot valve symbol 1 2 3 4 5 6 100 AC 200 AC 110 AC 220 AC 24 DC 12 DC q w e r t y u i Nil Y Nil Y Nil Nil Nil Nil K1 K1 J1 J1 Q1 Q2 N1 N2 Combinations (1) to (8) in the above table are the only possible options. 850

ZSE20(F)_ISE20

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7

SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .39831 lb

CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .02691 lb

SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .50600 lb

SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .28807 lb

CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .26477 lb

CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .04620 lb

CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 1.67420 lb

SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .36665 lb

CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .09460 lb

SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .26477 lb

Base Mounted Metal Seal/Rubber Seal Series VQ

Name plate [-N] VVQ1000-N2-Station (1 to Max. stations) P = 10.5 It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.

Process Valve Series VNA

Carbon dioxide (CO2, 0.7 MPa or less) Carbon dioxide (CO2, 0.7 to 1 MPa ) Nitrogen gas (N2) Argon Helium Water (standard, up to 60C) Water (up to 99C air operated type only) Flow characteristics (Air, Water) Turbine oil Spindle oil Fuel oil Class 3 (C fuel oil) To find the flow rate of air or water, refer to the table of flow rate characteristics on page 10 to 16.

CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .17160 lb

CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 1.76000 lb