PF2M7.eng Summary of Product parts Item Default setting Body Flow adjustment valve [FLU] Switch the flow rate [Air] Dry air, N2 [rEF] Setting the units criteria [Std] Standard condition [ L] L/min (L) Lock ring Display [Unit] Measurement unit seitching 1 [F 0] [FLU] [norP] SW output PNP/NPN setting 4 [PnP] PNP output [oUt] SW output Piping port (OUT side) [i_o] SW/external input setting 4 5 [oUt1]
Only dry air, N2, CO2 and Ar are applicable. Flow error Set value Bracket There is a flow of 5% or more in the wrong direction. Ensure the flow is in the correct direction. Hysteresis P_1 Flow [L/min] Bracket mounting Mount the bracket using the mounting screws supplied. The required tightening torque is 0.50.05 Nm.
N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32
Applications and Circuit Examples Cartridge type Cartridge type Disposable type Disposable type Refrigerated air dryer Heatless dryer Super mist separator After-cooler Air source Gas filtration and gas flow Odor removal filter Air tank Main line filter Mist separator Micro mist separator SFB3 SFC1 Micro mist separator with prefilter Membrane air dryer N2 gas SFB3 SFC1 SFA, SFB1 Clean blow
EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
bushing O-ring NBR Nickel plated Snap ring Carbon tool steel Nickel plated Rod end nut Steel Mounting nut Steel 13 Series MQM Lateral Load Resisting Low Friction Cylinder Metal Seal Dimensions Standard type/MQMLB 6 Mounting nut M12 x 1 Rod end nut 15 2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2
EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ~ = Refer to grommet type for other dimensions. 3-2-6 7 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Type 20 Manifold Body ported (Top ported) n1 = Number of VK3000 n2 = Number of VK300 VV5K3-20Station Grommet: G DIN terminal
N1 MM A F F S + Stroke H ZZ + Stroke (mm) P Bore size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8
EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
Fluoro rubber Cle6n ieguletd Fluoro rubber & Body size Fluorc resin 'l 10-32 UNF Construclion o-Non relieving (standard) 'l -Relieving {only applicable to Airor N2 gas) NoteiConsull factory ior applications ol othr tluids.
Fluid Vortex generator Vortex detector Temperature compensation element Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital
SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .47469 lb
SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .43351 lb
CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 2.04820 lb
CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .06160 lb
CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, 2.42000 lb
SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .39831 lb
CKZN SLIM LINE CLAMP CYLINDER, N2, 50MM CKZN SLIM LINE CLAMP CYL, .02691 lb