Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S
The solenoid must be connected to a safety barrier located in a non-hazardous area.
After installation, perform a leak test. Perform a leak test, such as helium leak test, pressure decay test, bubble leak test, etc., depending on the application. It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Confirm the specifications.
After installation, perform a leak test. Perform a leak test, such as helium leak test, pressure decay test, bubble leak test, etc., depending on the application. It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Confirm the specifications.
m) 5 std. 8-Mtal bowl wtft sight gauge I-Metalseal il Non-relieving type R-ln-Out rersal {Right Lett) X-Exchang brackt (I typ tor L Vp, or L type ior T V!) Body Czc Plasa lkt filtration att6r sutllx number Ex:ulolo.'..7-40 "Not a maximum pressur, .lYhon Bpaciting rnor than orE optbn, Pra3s ijs{ nuzE icrly lhn alprrEb{icatty.
After installation, perform a leak test. Perform a leak test, such as helium leak test, pressure decay test, bubble leak test, etc., depending on the application. It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Confirm the specifications.
After installation, perform a leak test. Perform a leak test, such as helium leak test, pressure decay test, bubble leak test, etc., depending on the application. It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Confirm the specifications.
A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.
Gripping point L (mm) Gripping point L (mm) F1 F1 532 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Construction q !
SOL.b SOL.a Digital vacuum pressure switch SOL.c 2 indicates the dimension when spacer A is mounted.
For futhr details ol accessorbs. reler lo 'accessorles' on page 6. 4 rP300 METHOD OF OPERATION Signal pressure from a controlled pressure source enters the 1P300 input chamber and exerts a force on the diaphragms. A pressure differential between the two diaphragms creates a force to open the pilot valve.
For futhr details ol accessorbs. reler lo 'accessorles' on page 6. 4 rP300 METHOD OF OPERATION Signal pressure from a controlled pressure source enters the 1P300 input chamber and exerts a force on the diaphragms. A pressure differential between the two diaphragms creates a force to open the pilot valve.
When pneumatic pressure is removed from the option a spring is allowed to rotate a collar that engages a collet brake system on the helix. Thus, the jaws are braked in position. Either an encompassing jaw system or jaws with compliance must be used with this option. Jarring can cause some iaw movement.
F1 Holding point L (mm) Holding point L (mm) F1 2.3-19 3 Finger Air Gripper Series MHR3/MDHR3 Construction MHR3 !
F1 F1 12-5-20 21 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Construction !
Direction Note) Values for 5 stations manifold with a 2 position single type valve.
name label. 1 2 3 i.2.8 C A U T I O N !
(A-B)/4 n_1=B+(A-B)/4 A= H_1=(A-B)/2 H_1=(A-B)/2 B= OUT2P_1n_1H_1P_2n_2H_2 1 -39No.PS-OMU0005CN-C [F 5] FUNC /FUNC 0 57[F97] <> [F 5] FUNC FUNC FUNC [ASin] [CoPY]( ) [AoUt] -40No.PS-OMU0005CN-C OUT1 OUT2 OUT1 OUT2 [F 5] FUNC 5ms ASin ooo1 C_5 5ms ASino.r1 ( ) C_5(44 ) C_5 -105.0105.0 kPa -210210.0 kPa -0.1051.050 MPa -1.1551.155 MPa 10.0-105.0 kPa -115.0115.0 kPa -41No.PS-OMU0005CN-C
1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDU Series 6-2 GWP 6 2 IDX-OM-W014 6 6-3 Q E D A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014
"LN", "MN" types: with 2 sockets. For connector cable of M8 connector, refer to page 562. Note 1) Be sure to enter a symbol of the cable length in with reference to P562. 496