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Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

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Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A L L1 Bore size (mm) 12 16 20 25 5 st 10 st 5 st 10 st 5 st 10 st Rod end male thread 61.4 13.5 24 51.4 8.5 19 59.5 13.5 25.5 49.5 8.5 20.5 64 14.5 28.5 54 9.5 23.5 Rod end nut 65.5 15 32.5 55.5 10 27.5 Flange bracket material: Carbon steel Double clevis style: CDQ2D Double Clevis Style A B CL L Bore size (mm) 12 16 20 25 CB CD CZ CT CU CW CX 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st

Electric Actuator/Slider Type

70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LEYG25M LEYG25M 0.1 0.1 100 1000 70 10 75 100 1000 70 10 75 Stroke [mm] Stroke [mm] Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200 mm/s or less

F

21 17.2/10 10 14 KQS10-U02 8 17 28.5 22 21 39/26.6 10 38 KQS10-U03 8 17 26.5 20 21 39/26.6 10 12 KQS10-U04 8 21 27 19 21 39/26.6 12 14 KQS12-U02 8 19 35 25.5 22 46/44.5 12 38 KQS12-U03 9 19 28 19 22 60/44.5 12 12 KQS12-U04 9 21 27 19 22 60/44.5 P R O D U C T S E L E C T O R 45 M A L E E L B O W : KQK (KQ2K) Use to tubing toward 45 from the thread part.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8

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VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

SY

SS5Y71, #1 L type plug connector . SS5Y71, #1 + #10 M type plug connector .

Made to Order

(mm) Model F L K P Q S SS Z ZZ CXWL20-225 116.5 239 42 90 564 227 323 550 578 CXWL20-250 264 42 90 614 252 348 600 628 129 CXWL20-275 141.5 289 42 90 664 277 373 650 678 Model F L K P Q S SS Z ZZ CXWL32-225 41 277 30 255 584 227 337 564 604 CXSJ series: 10 M L CXSJ series: 15, 20, 25, 32 M L Stroke Stroke ZZ ZZ SS SS Z Z K CXSJ 10 M L CXSJ 15 M L CXSJ 20 M L CXSJ 25 M L CXSJ 32 M L Model

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N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Air Cylinder

With air cushion GA WA GB WB 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH W 10 With rod boot 8 8 8 IJ IJ e e JH f f l l JW ZZ + l + Stroke ZZ + l + Stroke h + l h + l 80, 100 (mm) Bore size Stroke range Rc, NPT port G port A AL B B1 C D E F FD FT FX H H1 I J K Standard Long stroke GA GB P GA GB P 20 Up to 200 201 to 1500 12 10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 40 13 14 8 12

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

5

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

MY1

MY1HT50/63 R L L R L R L R L R Slide table operating direction 8-11-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8-11-10 11 Basic Type Series MY1B MX MTS MY 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

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is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

ISO Cylinder

b g (k) l3 j e (l) c d7 d6 h [mm] [mm] Bore size Part no. b c d f g j k e l 8 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 10 GKM4-8 4 8 16 4 8 8 11 M4 x 0.7 21 12 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

130 (138) + l 6 6 7 7 10 12 11 14 32 10 110(118) 44 15 38.5 22 45(53) 3 3.5 7 74 + l 137.5(145.5) + l 36 10 115.5(123.5) 49 15 45 25 45(53) 3 3.5 8 75 + l 139.5(147.5) + l 44 10 117.5(125.5) 58 16 54.5 30 51(60) 3 4 8.5 83.5 + l 155(164) + l 54 10 135(144) 71 16.5 2-LC (Knock pin position) 70.5 40 55(67) 4.5 5 11 95.5 + l 177.5(189.5) + l 66 17.5 157.5(169.5) 86 22 CJ1 LS + Stroke 82.5 45

smcmaintenancepartslist

NBR FKM KA00809 KA00725 Quantity 1 1 1A-P85 4D-P85 FNR100N-10 1.1 L Rc1 Stainless steel 304 FNR100V-10 FNR101N-10 FNR101V-10 Model Tank capacity Port size 1.8 L 4 O-ring Industrial Filters Replacement Procedure Actuators Modular F.R.L.